Low-loss silicon-based filter chip capable of improving reuse rate and manufacturing method thereof

Abstract

The invention discloses a low-loss silicon-based filter chip capable of improving reuse rate and a manufacturing method thereof. The silicon-based filter chip comprises a high-resistance silicon dielectric layer, a first metal layer, a second metal layer, a third metal layer and a fourth metal layer, the first metal layer is arranged on the top surface of the high-resistance silicon dielectric layer; a silicon cavity is formed in the bottom surface of the high-resistance silicon dielectric layer in a concave manner; the second metal layer is arranged in the silicon cavity; the third metal layer is arranged on the bottom surface of the high-resistance silicon dielectric layer and keeps away from the silicon cavity, the fourth metal layer is arranged on the bottom surface of the third metallayer, a through hole penetrating through the first metal layer upwards is formed in the high-resistance silicon dielectric layer, a metal deposition layer is arranged on the inner wall of the throughhole, and production is carried out through etching and micromachining processes. With application of the mode, the low-loss silicon-based filter chip capable of improving the reuse rate and the manufacturing method thereof are convenient to produce, the out-of-band rejection degree of the silicon-based filter chip is improved, loss is reduced and the reuse rate is high.

Description

technical field [0001] The invention relates to the field of filter circuits, in particular to a low-loss silicon-based filter chip with improved reusability and a manufacturing method thereof. Background technique [0002] Filters play an important role in frequency selective filtering in microwave and millimeter wave systems. Specifically, filters allow electrical signals of a certain frequency to pass through while blocking electrical signals of other frequencies. The main performance indicators of filters include insertion loss, bandwidth, out-of-band selectivity, and circuit size. Widening bandwidth, improving out-of-band rejection, and circuit miniaturization have always been the key design difficulties of filters. [0003] Traditional filters include cavity filters, LC filters and planar filters. The cavity filter is formed by cutting metal as a whole, the LC filter is composed of a combination of inductors, capacitors and resistors, and the planar filter is composed ...

AI Technical Summary

Problems solved by technology

[0004] The main technical problem to be solved by the present invention is to provide a low-loss silicon-based filter chip with improved reuse rate and its manufacturing method, so as to solve the problem that the existing traditional filter has a large volume and is difficult to realize multi-chip integration, and solve the existing Silicon-based filter chips have problems such as poor out-of-band rejection, high loss, and low chip utilization

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