High-purity gas preparation device
A high-purity, systematic technology, applied in gas treatment, dispersed particle filtration, membrane, etc.
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[0038] The high-purity gas production device of the present invention will be described in detail below. It should be understood that the content described here is only used to illustrate and explain the present invention, but not to limit the present invention.
[0039] The high-purity gas production device of the present invention will be further described below in conjunction with the accompanying drawings, as Figure 1 to Figure 6 As shown, the present invention provides a high-purity gas production device, which includes a feed gas inlet pipe 1, a feed gas control distributor 2, a membrane separation module 3, an adsorption separation module 4, a product gas controller 5, and a device center Axis 6.
[0040] The raw material gas control distributor 2 includes a raw material gas buffer plate 201 and a raw material gas distribution plate 202 .
[0041] The raw material gas buffer plate 201 is provided with a groove-shaped raw material gas buffer zone 203, and the groove i...
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