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Antireflection film cleaning and reusing device and cleaning method

A technology for multiplexing devices and anti-reflection coatings, applied in cleaning methods and utensils, chemical instruments and methods, etc., can solve the problems of optical performance and anti-laser damage performance degradation, etc.

Pending Publication Date: 2020-07-03
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Since the structure of the chemical sol-gel anti-reflection film is loose and porous, and the surface contains a large amount of silanol, it is easy to absorb moisture and organic matter in the environment when used in a high-vacuum environment, thereby reducing the optical performance and laser damage resistance.

Method used

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  • Antireflection film cleaning and reusing device and cleaning method

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Embodiment Construction

[0022] In order to make the technical solutions of the present invention clearer and clearer to those skilled in the art, the present invention will be further described in detail below in conjunction with the examples and accompanying drawings, but the embodiments of the present invention are not limited thereto.

[0023] like figure 1 As shown, an anti-reflection film cleaning multiplexing device includes a vacuum chamber 1, a vacuum unit 14, a plasma control assembly 7, a vacuum sealing assembly 15 and an element fixture 2, and the element fixture 2 is installed in the vacuum chamber 1 on the top side of the inner wall, the vacuum unit 14 is installed on the bottom side of the vacuum chamber 1, and the vacuum sealing assembly 15 is installed on the outer surface of the vacuum chamber 1 and communicates with the vacuum chamber 1 , the plasma control component 7 controls the plasma reaction in the vacuum chamber 1 .

[0024] Further, the vacuum sealing assembly 15 includes a...

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Abstract

The invention discloses an antireflection film cleaning and reusing device and belongs to the technical field of antireflection film cleaning devices. By placing an antireflection film and a substrateoptical component vertically in a vacuum chamber by using a clamp, one end of the vacuum chamber is sealed by a blind plate while the other end of the vacuum chamber is sealed by quartz glass. A vacuum unit is started, and a vacuum pump reduces air pressure in a cavity to a preset value quickly, so that the vacuum degree in the chamber meets a plasma generation condition, and therefore, proper reaction gas such as oxygen and argon is introduced from an inflating end. Electrodes distributed in the cavity in an encircling manner are controlled by a plasma generator to generate a plasma field, and the plasma is acted to the optical component and the antireflection film on the surface of the optical component, so that a service purpose that organic pollutants on the surface of the antireflection film of the film are removed is achieved finally.

Description

technical field [0001] The invention relates to an anti-reflection film cleaning and multiplexing device, in particular to an anti-reflection film cleaning device for optical elements, belonging to the technical field of optical elements and anti-reflection film cleaning devices. Background technique [0002] Anti-reflection coatings are mainly used to reduce the reflection loss of light energy on the surface of optical components. Usually, a layer of transparent medium film with a refractive index lower than that of the substrate is coated on the light-transmitting surface of the optical element surface. Using the principle of light interference, the reflected light of the incident light on the upper and lower surfaces of the film interferes and cancels, thereby making the reflection The light energy decreases, and the transmitted light energy increases relatively. There are two methods commonly used at present, namely physical method and chemical method. The chemical sol...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B08B7/00B08B13/00
CPCB08B7/00B08B13/00
Inventor 祖小涛董祥向霞吕海兵严鸿维刘昊苗心向
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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