Cylinder and the machine including the cylinder

Abstract

The invention provides a cylinder and a machine including the cylinder. The cylinder includes: a cylinder body, a piston rod and a piston, the piston rod passes through the axial end of the cylinder body, and the piston is movably arranged inside the cylinder body and connected with the piston rod; the cylinder body includes: inner and outer cylinder bodies , the outer cylinder is fixedly sleeved outside the inner cylinder and sealed with it, and an outer chamber is formed between the inner and outer cylinders; the piston includes inner and outer piston bodies, the inner piston body is located in the inner cylinder, and the outer The piston body is located in the outer chamber and is used to move synchronously with the inner piston body; the first and second holes communicating with the outer chamber and the inner cylinder body are opened on the side wall of the inner cylinder body; The third and fourth holes communicated with the outer chamber and the outside; and the first and third holes are located on one side of the piston, and the second and fourth holes are located on the other side of the piston; such a structure can improve the cylinder service life, the preferred piston rod is only one, to simplify the structure of the cylinder.

Description

technical field [0001] The invention relates to the technical field of cylinders, in particular to a cylinder and a machine including the cylinder. Background technique [0002] Wafer (wafer) is the basic material for manufacturing semiconductor chips. During its manufacturing process, it is inevitable to undergo an etching process. [0003] The etching process is usually carried out on an etching machine, and a dry etching machine is commonly used. The dry etching machine is equipped with a transfer chamber and an etching chamber, and the wafer is sent into the etching chamber through the transfer chamber to perform the etching process. During etching, in order to avoid contamination and pressure disturbance between the chambers, an openable door is provided between the transfer chamber and the etching chamber. In addition, the dry etching machine is also equipped with a lifting device, which drives multiple thimbles through the electrostatic chuck, so as to lift the wafe...

AI Technical Summary

Problems solved by technology

However, the door between the transfer chamber and the etching chamber is often not closed tightly, causing the dry etching machine to stop or stop production

Not only that, the wafer is also prone to shaking, falling, etc., and even more by-products (usually polymer) are deposited on its surface, which increases the defect rate of the wafer and reduces the processing quality

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