Multi-degree-of-freedom sample rod

Abstract

The invention discloses a multi-degree-of-freedom sample rod, and the sample rod comprises a shell and a rotating shaft; a skeleton is arranged between the shell and the rotating shaft, and the skeleton is coaxial with the shell and the rotating shaft. During assembly, the rotating shaft and the skeleton are coaxial, then the rotating shaft-skeleton is installed in the shell, and the rotating shaft, the skeleton and the shell are coaxial, so the installation precision is improved; in addition, the skeleton further provides an installation position for the rotating shaft driving assembly, and the skeleton further plays a role in separating the rotating shaft from the wire and preventing the wire from interfering with rotating shaft movement.

Description

technical field [0001] The invention relates to a sample rod used under an electron microscope and a transmission electron microscope. Background technique [0002] Transmission electron microscopy (TEM) can see fine structures smaller than 0.2 μm that cannot be seen clearly under ordinary optical microscopes. These structures are called submicrostructures or ultrastructures. In 1932, Ruska invented the transmission electron microscope with electron beam as the light source. Currently, the resolution of TEM can reach 0.2nm. [0003] In situ observation techniques have a long history in transmission electron microscopy research. By applying various physical effects on the sample and using a transmission electron microscope (TEM) to observe the changes in the microstructure and chemical state of the material, it is possible to intuitively study the performance of the material or device in the actual use process. For the performance of the material The research has important ...

AI Technical Summary

Problems solved by technology

[0005] The disadvantages of this three-dimensional probe are: 1. The flexible claw is easy to deform. In order to maintain the friction between it and the ball, the shape of the flexible claw needs to be adjusted frequently, but there are many flexible claws, and it is impossible to ensure that each The consistency of the flexible wire claws, resulting in the lower and lower reliability and accuracy of the three-dimensional probe with the time and frequency of use

2. The length of the flexible wire claw makes there is a gap between the sample holder and the ball. When the ball circulates, the sample holder will move away from the ball or close to the ball along the wire claw, so as to realize the axial displacement of the sample. , but the sample holder is suspended on the ball through flexible wire claws, the sample holder and the sample on it will fall down due to gravity, and the position accuracy is not high

The observation field of view in the transmission electron microscope is at the nanometer and micron level, and the position deviation of the sample due to gravity is likely to cause the area to be observed on the sample to deviate from the observation field of view of the electron microscope and cannot be observed; and the existence of position deviation makes it difficult to place the sample Adjust the area to be observed to a suitable position and angle for observation

3. When the probe clamping device moves back and forth along the axial direction of the piezoelectric ceramic tube, the relationship between the shape of the flexible wire claw and the above-mentioned frictional force is complicated, and it is difficult to ensure that the frictional force is always suitable by adjusting its shape

In addition, the probe clamping device is affected by gravity, which makes it easy to generate coupling motion during rough adjustment, and it is difficult to accurately control the probe; even due to improper adjustment of the shape of the flexible wire claw, the small ball cannot be grasped, which may cause the probe to clamp The device falls into the device, causing damage to the device

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