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Inchworm type piezoelectric linear driver

A linear drive, piezoelectric technology, applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., can solve the problem of small output displacement of inchworm type piezoelectric linear drive.

Pending Publication Date: 2020-06-23
NINGBO AUX ELECTRIC
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0006] The problem solved by the present invention is how to solve the problem of small output displacement of the inchworm piezoelectric linear driver

Method used

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  • Inchworm type piezoelectric linear driver
  • Inchworm type piezoelectric linear driver
  • Inchworm type piezoelectric linear driver

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Embodiment Construction

[0052] In order to make the above objects, features and advantages of the present invention more comprehensible, specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings.

[0053] see figure 1 In this embodiment, an inchworm-type piezoelectric linear actuator 10 is provided, and the inchworm-type piezoelectric linear actuator 10 can solve the problem of small output displacement of the inchworm-type piezoelectric linear actuator 10 .

[0054] Among them, please refer to figure 1 , figure 2 with image 3 , the inchworm piezoelectric linear actuator 10 includes a sliding table 400 , a carrying table 300 , a driving assembly 100 and a clamping assembly 200 . The carrying platform 300 is used to be fixedly installed on a carrying plane, which may be the ground, a working table, or an installation plane on the body of other equipment. Moreover, the sliding table 400 , the driving assembly 100 and the clamping...

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Abstract

The invention provides an inchworm type piezoelectric linear driver, and relates to the technical field of inchworm type driving equipment. The inchworm type piezoelectric linear driver comprises a sliding table, a bearing table, a driving assembly and a clamping assembly. The sliding table is in sliding fit with the bearing table. The clamping assembly is clamped on the sliding table and can be selectively disengaged from the sliding table. The driving assembly comprises a first driving device, a first bridge type amplification structure and a second bridge type amplification structure. The first driving device is connected to the first bridge type amplification structure and used for driving the first bridge type amplification structure to deform. The first bridge type amplification structure is connected to the second bridge type amplification structure and used for driving the second bridge type amplification structure to deform; and one end of the second bridge type amplificationstructure is connected to the bearing table, and the other end of the second bridge type amplification structure is connected to the clamping assembly and can drive the clamping assembly to slide relative to the bearing table during deformation. The inchworm type piezoelectric linear driver provided by the invention can solve the problem of small output displacement of the inchworm type piezoelectric linear driver.

Description

technical field [0001] The invention relates to the technical field of an inchworm-type driving device, in particular to an inchworm-type piezoelectric linear driver. Background technique [0002] In recent years, with the rapid development of information technology and precision testing technology, the demand for large optical devices with microstructured surfaces (such as microlens arrays, micromirror arrays, and gratings) has been increasing. The unit size of the surface microstructure of these optical devices is generally on the order of microns, while the surface size of the entire microstructure reaches the order of millimeters or centimeters. In order to obtain these large optical devices, whether it is for its processing or the measurement of its processed surface topography, a large-stroke, high-resolution precision positioning system is required, and as the driver of this precision positioning system It must also have a large stroke and high resolution. [0003] ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/023H02N2/04
Inventor 应志奇张显刘世勇李小斌
Owner NINGBO AUX ELECTRIC
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