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Piezoelectric driven micro-positioning platform based on hourglass displacement amplifier mechanism

A technology of displacement amplification mechanism and micro-positioning platform, which is applied in the direction of generator/motor, piezoelectric effect/electrostrictive or magnetostrictive motor, electrical components, etc., which can solve the problem of small travel and achieve the elimination of coupling and motion The effect of high resolution and increased output displacement

Inactive Publication Date: 2018-06-22
SHENYANG POLYTECHNIC UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

At present, most micro-positioning platforms use the principle of lever amplification to increase the output displacement, but the lever amplification will produce kinematic coupling at the same time, and the stroke is relatively small

Method used

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  • Piezoelectric driven micro-positioning platform based on hourglass displacement amplifier mechanism
  • Piezoelectric driven micro-positioning platform based on hourglass displacement amplifier mechanism
  • Piezoelectric driven micro-positioning platform based on hourglass displacement amplifier mechanism

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Embodiment Construction

[0030] A piezoelectric-driven micro-positioning platform based on an hourglass-shaped displacement amplification mechanism, characterized in that the platform includes: an outer support (3), an hourglass-shaped displacement amplification mechanism, a piezoelectric ceramic driver (2), and a symmetrical long-arm hinge , the workbench (6) and the inner substrate (7); the hourglass-shaped displacement amplification mechanism is divided into the x-direction hourglass-shaped displacement amplification mechanism (1) and the Y-direction hourglass-shaped displacement amplification mechanism (4), and the symmetrical long-arm hinge is divided into x A direction symmetrical long arm hinge (5) and a Y direction symmetrical long arm hinge (8);

[0031] One end of the workbench (6) is connected to the symmetrical long arm hinge (8) in the Y direction, the other end of the workbench (6) is connected to the hourglass-shaped displacement amplification mechanism (4) in the Y direction, and the wo...

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Abstract

The invention provides a piezoelectric driven micro-positioning platform based on an hourglass displacement amplifier mechanism. The platform comprises an outer-layer support (3), the hourglass displacement amplifier mechanism, a piezoelectric ceramic actuator (2), symmetrical long arm hinges, a workbench (6) and an inner-layer substrate (7). The hourglass displacement amplifier mechanism comprises an x-direction hourglass displacement amplifier mechanism (1) and a Y-direction hourglass displacement amplifier mechanism (4). The symmetrical long arm hinges comprise x-direction symmetrical longarm hinges (5) and Y-direction symmetrical long arm hinges (8). The piezoelectric driven micro-positioning platform based on the hourglass displacement amplifier mechanism can realize large-stroke motion of the workbench. Certainly, implementation of any product or method of the invention does not necessarily require all the advantages described above to be achieved simultaneously.

Description

technical field [0001] The invention relates to the technical field of micro-electromechanical control systems, in particular to the field of precise positioning of micro-displacement workbenches. The piezoelectric-driven micro-positioning platform based on an hourglass-shaped displacement amplification mechanism is specifically a micro-positioning platform with a large stroke and no coupling driven by piezoelectric ceramics. Background technique [0002] In recent years, with the rapid development and progress of science and technology, human research has expanded from the macroscopic field to the microscopic field, especially in many disciplines such as micro-electromechanical systems, bioengineering, microelectronics technology, optics, etc. With the development of miniaturization and miniaturization, the performance requirements of precision machinery and instruments are getting higher and higher, and the development of high-precision micro-positioning operating systems ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H02N2/02H02N2/04
CPCH02N2/028H02N2/043
Inventor 徐方超魏恒志孙凤李强
Owner SHENYANG POLYTECHNIC UNIV
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