Single-mass-block three-axis MEMS inertial accelerometer with low depth-to-width ratio and preparation method thereof

An accelerometer, single-mass technology, used in the direction of acceleration measurement using inertial force, measurement of acceleration, multi-dimensional acceleration measurement, etc.

Active Publication Date: 2020-06-16
YANGZHOU UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

The MEMS multi-axis accelerometer with a single-mass structure uses the same mass to sense the motion acceleration of multiple o

Method used

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  • Single-mass-block three-axis MEMS inertial accelerometer with low depth-to-width ratio and preparation method thereof
  • Single-mass-block three-axis MEMS inertial accelerometer with low depth-to-width ratio and preparation method thereof
  • Single-mass-block three-axis MEMS inertial accelerometer with low depth-to-width ratio and preparation method thereof

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specific Embodiment

[0173] Specific embodiment: a single-mass three-axis accelerometer with a low aspect ratio structure.

[0174] combine Figure 1 to Figure 6 , the single-mass triaxial accelerometer with a low aspect ratio structure includes a bottom plate 1, a cavity structure layer 2, a mass and cantilever beam structure layer 3, and a top plate 4, and each of the above-mentioned structural layers is bonded sequentially from bottom to top.

[0175] combine figure 1 and figure 2 , the bottom plate 1 includes a bottom plate substrate 11, four bottom capacitor bottom electrodes 12, four bottom capacitor output electrodes 13, four bottom capacitor bottom electrode lead wires 14 and a bottom plate bonding ring 15;

[0176] The base substrate 11 is a square cross-section substrate;

[0177] The lower electrodes 12 of the four bottom capacitors are square electrodes of the same shape, which are symmetrically arranged in the middle of the top surface of the bottom substrate 11;

[0178] The fou...

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Abstract

The invention discloses a single-mass-block three-axis MEMS inertial accelerometer with a low depth-to-width ratio. The single-mass-block three-axis MEMS inertial accelerometer comprises a bottom plate, a cavity structure layer, a mass block and cantilever beam structure layer and a top plate which are sequentially bonded from bottom to top, wherein the bottom plate and the cavity structure layerare bonded through using a bottom plate bonding ring; the cavity structure layer and a cantilever beam clamped frame are bonded through using a cavity substrate bonding ring; each cantilever beam is suspended above a cavity and mass blocks are suspended in the cavity; and the cantilever beam clamped frame is bonded with the top plate by means of a top plate bonding ring, so as to form a gastight sealed structure finally. According to the single-mass-block three-axis MEMS inertial accelerometer, the mass blocks and the cavity structure layer with low depth-to-width ratios are adopted, the overall structure is simple, the preparation process is simplified, the manufacture is convenient, and the sensing sensitivity and the sensing precision of the axial acceleration are high.

Description

technical field [0001] The invention relates to an inertial accelerometer, in particular to a single-mass three-axis MEMS inertial accelerometer with a low aspect ratio. Background technique [0002] MEMS accelerometers are based on micro-mechanical electronics (MEMS) technology and are manufactured using micro-machining techniques. They have the advantages of small size, light weight, low energy consumption, and high reliability. They are widely used in automotive, consumer electronics, industrial control, military and other fields. [0003] The motion-sensitive structural body of the MEMS accelerometer includes a mass block and a mass block suspension support system, and senses acceleration motion information by detecting the relative displacement of the mass block. The motion-sensitive methods of MEMS accelerometers include capacitive, piezoresistive, piezoelectric, and resonant, among which capacitive MEMS accelerometers are the most widely used. [0004] MEMS accelerom...

Claims

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Application Information

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IPC IPC(8): G01P15/125G01P15/18B81C1/00B81C3/00
CPCG01P15/125G01P15/18B81C1/00047B81C1/00388B81C1/00539B81C3/001G01P2015/0862
Inventor 赵成杨义军朱骏郭鹏飞王健
Owner YANGZHOU UNIV
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