Surface scanning probe system and spectrometer

A spectrometer and surface scan technology, applied in the field of spectrometers, can solve the problems of low detection accuracy and low safety of mixed substances by spectrometers

Pending Publication Date: 2020-04-28
BEIJING CLOUDOPTEK TECH CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] However, due to the energy concentration of the excitation beam, flammable and explosive substances will be igni...

Method used

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  • Surface scanning probe system and spectrometer
  • Surface scanning probe system and spectrometer
  • Surface scanning probe system and spectrometer

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Embodiment Construction

[0040] Specific embodiments of the present disclosure will be described in detail below in conjunction with the accompanying drawings. It should be understood that the specific embodiments described here are only used to illustrate and explain the present disclosure, and are not intended to limit the present disclosure.

[0041] In the present disclosure, "inner and outer" as used is "inner and outer" with respect to the contour of the corresponding part itself, unless stated to the contrary. In addition, the terms "first, second" and the like used in the present disclosure are for distinguishing one element from another, and do not have sequence or importance. Furthermore, in the following description, when referring to the drawings, the same reference numerals in different drawings denote the same or similar elements unless otherwise explained. The above definitions are only used to explain and illustrate the present disclosure, and should not be construed as limiting the p...

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Abstract

The invention relates to a surface scanning probe system and a spectrometer. The surface scanning probe system comprises a first shell, a surface scanning optical module, a MEMS module, and an objective lens module, wherein the shell is provided with a light guide hole so as to enable an excitation light beam to irradiate into the first shell, and the excitation light beam comes from a light passing hole of a Raman detection system of the spectrometer; the surface scanning optical module is mounted to the first shell and includes a reflection element; the MEMS module is fixed to the first shell and includes an MEMS driver and an MEMS reflector, and the MEMS driver drives the MEMS reflector to move; and the objective lens module is fixed to the first shell and includes a collimating lens, and the excitation light beam entering from the light guide hole is reflected by the reflecting element, then irradiates towards the MEMS reflector and is reflected by the MEMS reflector into a plurality of parallel light beams which irradiate towards an image side surface of the collimating lens at different angles. Through the technical scheme, the surface scanning probe system provided by the invention can realize multi-point detection scanning, and is beneficial to improving operation safety and detection precision of the spectrometer.

Description

technical field [0001] The present disclosure relates to the technical field of spectrometers, and in particular, to a surface scanning probe system and a spectrometer. Background technique [0002] A spectrometer is a scientific instrument that can decompose light with complex components into spectral lines. The spectrometer can be used to measure the light reflected by the substance to be tested, and the optical signal is converted into an electrical signal by the light-sensitive element in the spectrometer and transmitted to the processor for processing. The instrument analyzes and compares the electrical signal with the reference data in the spectrometer to identify the substance to be detected. [0003] In the process of identifying substances, the laser emitter in the spectrometer emits an excitation beam, and the excitation beam is focused to a point by the optical element to irradiate the substance to be measured, and different Raman spectra will be scattered. The l...

Claims

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Application Information

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IPC IPC(8): G01N21/65
CPCG01N21/65
Inventor 不公告发明人
Owner BEIJING CLOUDOPTEK TECH CO LTD
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