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Piezoelectric transducer, production method thereof, and electronic equipment

A piezoelectric transducer and electronic equipment technology, applied in the field of electronics, can solve the problems of insufficient bending stress, the signal-to-noise ratio of the piezoelectric electroacoustic transducer of bending stress cannot meet the requirements, etc., so as to reduce the amount of warpage and improve the The effect of widening the gap and improving the noise ratio

Active Publication Date: 2020-04-24
SHANDONG GETTOP ACOUSTIC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the piezoelectric diaphragm is deformed, the bending stress is still not enough
Especially when the piezoelectric transducer is a piezoelectric electroacoustic transducer, the bending stress is not enough when the piezoelectric diaphragm is deformed, and the signal-to-noise ratio of the piezoelectric electroacoustic transducer cannot meet the requirements.

Method used

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  • Piezoelectric transducer, production method thereof, and electronic equipment
  • Piezoelectric transducer, production method thereof, and electronic equipment
  • Piezoelectric transducer, production method thereof, and electronic equipment

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Embodiment Construction

[0035] In order to make the purpose, technical solution and advantages of the present application clearer, the present application will be further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described here are only used to explain the present application, and are not intended to limit the present application.

[0036] In the description of the present application, it should be understood that the terms "central", "lateral", "upper", "lower", "left", "right", "vertical", "horizontal", "top", " The orientation or positional relationship indicated by "bottom", "inner" and "outer" are based on the orientation or positional relationship shown in the drawings, which are only for the convenience of describing the application and simplifying the description, rather than indicating or implying the referred device or positional relationship. Elements must have certain orientations, be cons...

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Abstract

The invention relates to a piezoelectric transducer, a production method thereof, and electronic equipment. The piezoelectric transducer comprises a supporting structure and a piezoelectric vibratingdiaphragm arranged on the supporting structure; the piezoelectric vibrating diaphragm comprises a beam, one end of the beam in the first direction is supported by the supporting structure, and the other end of the beam is a free end; and the piezoelectric vibrating diaphragm comprises a first electrode layer and a piezoelectric material layer which are sequentially arranged on the supporting structure in a stacked mode, wherein the area of the piezoelectric material layer at the free end is smaller than that of the first electrode layer. Compared with a traditional piezoelectric transducer, the piezoelectric transducer, the piezoelectric transducer of the invention has the following advantages: when the piezoelectric vibrating diaphragm deforms, the bending stress is large; and particularly when the piezoelectric transducer is a piezoelectric electroacoustic transducer, the signal to noise ratio is high.

Description

technical field [0001] The invention relates to the field of electronic technology, in particular to a piezoelectric transducer, a method for preparing the piezoelectric transducer and electronic equipment. Background technique [0002] In the preparation of piezoelectric transducers, it is difficult to control the residual stress of the thin-film stack in the piezoelectric diaphragm manufacturing process, so that the stress of the full-film piezoelectric transducer cannot be released. Therefore, the rigidity of the piezoelectric diaphragm will be increased, resulting in piezoelectric transduction Sensitivity drops. [0003] The traditional solution is to make the piezoelectric diaphragm into a cantilever beam structure to release the residual stress and improve the sensitivity of the piezoelectric transducer. However, when the piezoelectric diaphragm is deformed, the bending stress is still insufficient. Especially when the piezoelectric transducer is a piezoelectric elec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): H01L41/08H01L41/04H04R17/00H10N30/00H10N30/80
CPCH04R17/00H04R17/005H10N30/80H10N30/101
Inventor 罗松成陈昱辰方维伦
Owner SHANDONG GETTOP ACOUSTIC
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