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A three-dimensional integrated metasurface device, its preparation method and application

A three-dimensional integration and metasurface technology, which is applied in the direction of instruments, optical components, optical waveguides, etc., can solve the problems of inability to realize electromagnetic waves, separation, and limited multifunctional devices.

Active Publication Date: 2020-12-11
INST OF PHYSICS - CHINESE ACAD OF SCI
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the research on the current three-dimensional integrated metasurface devices is relatively small, and the multifunctional devices realized are limited, and the separation of electromagnetic waves in space and wavelength cannot be realized.

Method used

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  • A three-dimensional integrated metasurface device, its preparation method and application
  • A three-dimensional integrated metasurface device, its preparation method and application
  • A three-dimensional integrated metasurface device, its preparation method and application

Examples

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Embodiment 1

[0100] This example is used to illustrate the preparation method of the multifunctional three-dimensional integrated metasurface device of the present invention.

[0101] figure 1 A process flow diagram of the three-dimensional integrated metasurface device for realizing the separation of space and wavelength of cross-polarized light prepared in Example 1 of the present invention is shown.

[0102] Step S1. Deposit a metal film 2 on a clean substrate 1 as a light reflection layer; the substrate can be quartz, silicon, sapphire, etc.; the metal reflection layer requires its reflectivity to be close to a value of 1, such as gold, aluminum, silver, etc.; used The deposition method can be one of physical vapor deposition or chemical vapor deposition.

[0103] Step S2. On the metal film obtained in step S1, deposit a multilayer dielectric 3 and metal 4 film in sequence; the metal material is gold, silver, aluminum, aluminum-doped zinc oxide, etc., and the dielectric material is zi...

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Abstract

The invention discloses a three-dimensional integrated metasurface device for realizing separation of space and wavelength of cross polarization light. The three-dimensional integrated metasurface device comprises a substrate, a metal reflection layer, a hyperbolic metasurface layer, a transparent isolation layer and a filtering metasurface layer which are sequentially arranged from top to bottom.The invention further provides a preparation method and application of the three-dimensional integrated metasurface device. According to the invention, the hyperbolic metasurface capable of realizingphase regulation and control and the filter metasurfaces with different wavelengths are integrated together, so that separation of cross polarization light in space and wavelength is realized. The whole device preparation has the characteristics of flexible design and diversified processing methods. And the device performance has the advantages of multifunctionality and wide waveband. The methodis of great significance to the development of three-dimensional integrated metasurface devices.

Description

technical field [0001] The invention belongs to the field of three-dimensional integrated metasurface devices, and in particular relates to a three-dimensional integrated metasurface device for realizing space and wavelength separation of cross-polarized light, a preparation method and application thereof. Background technique [0002] Metasurfaces refer to artificial electromagnetic materials composed of periodic or non-periodic subwavelength unit structures. At present, metasurfaces have been greatly developed and researched. A large number of studies have shown that metasurfaces can effectively control the polarization, amplitude, phase, and propagation mode of electromagnetic waves. At the same time, the metasurface has the characteristics of small size and easy processing, and can realize the functions of traditional optical components at the micro-nano scale, such as holographic imaging, lens, structural color, quarter-wave plate, etc. However, these metasurfaces can...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G02B6/12G02B6/126G02B6/13
CPCG02B6/12002G02B6/12007G02B6/126G02B6/13G02B2006/12035G02B2006/12085G02B2006/12166
Inventor 顾长志胡莎潘如豪全保刚李俊杰
Owner INST OF PHYSICS - CHINESE ACAD OF SCI
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