A kind of multifunctional flexible sensor and its preparation method and application

Abstract

The invention belongs to the field of electronic skin, and discloses a multifunctional flexible sensor and a preparation method and application thereof. The multifunctional flexible sensor comprises acapacitance layer. The capacitor layer comprises a bottom-layer flexible substrate, a bottom electrode, an intermediate dielectric layer, conductive electrodes, a top electrode and a top-layer flexible substrate from bottom to top, wherein the bottom electrode is a plate electrode; the intermediate dielectric layer is provided with a plurality of flexible protrusions which are fluctuant; each plate electrode on the top electrode is provided with a lead; tail ends of the leads on the two plate electrodes are oppositely arranged to form gaps; the conductive electrodes are arranged under the gaps; when the conductive electrodes are not embedded into the gaps, the two plate electrodes form a capacitor; and when the top-layer flexible substrate is subjected to external force, the top electrodemoves downwards, the conductive electrodes are embedded into the gaps, the two plate electrodes are conducted to form a resistor, and meanwhile, the top electrode and the bottom electrode form a capacitor. According to the invention, the measurement of temperature, distance and stress is realized, and the number of leads and the requirements of lead interfaces are reduced.

Description

technical field [0001] The invention belongs to the field of electronic skin, and more specifically relates to a multifunctional flexible sensor and its preparation method and application. Background technique [0002] With the discovery of new materials and the advancement of technology, the field of flexible electronics has made great progress. In order to obtain flexible pressure sensing devices, organic or inorganic electronic materials are integrated on flexible substrates and a certain microstructure is used. , the performance is not lower than or even exceeds that of traditional rigid sensor devices. As the largest organ of the human body, the skin has a huge and dense sensor network distributed in the skin tissue. For example, there are various receptors distributed in the hands of the human body, including pain receptors, temperature receptors and mechanical stimulation receptors, which can be used for static force , skin stretching, vibration, temperature, object ...

AI Technical Summary

Problems solved by technology

[0003] 1cm 2 Hundreds of sensing units with different functions are integrated inside, and each unit is an independent sensing module. The occupied space and the number of interface leads do not interfere with each other, which will result in a huge number of port leads required by the device.

Invention patent CN106595940A proposes a flexible multifunctional sensor, which uses the resistance change of sensitive materials to measure pressure and bending, but the invention integrates fewer physical quantities and a small area, and the two quantities will be coupled to each other

Using this integration method, with the increase of the number of functions and the increase of sensing density, the process will be complicated, the number of lead interfaces will increase, and the consumption of hardware resources will increase.

In addition, it is not advisable to use one functional layer corresponding to two functions, but the physical quantities measured by these two functions will be coupled with each other.

[0004] Therefore, with the continuous increase in the number of sensing and excitation modules, the ratio of the number of functions of flexible sensors to the number of ports (or leads) is low, resulting in a high burden on system resources, complex manufacturing processes for devices, low space utilization, and circuit hardware parts. It needs a higher cost to develop an electronic skin with bending, vibration, three-way pressure, object proximity and temperature measurement, which solves the existing problems of electronic skin with single function, many lead interfaces and low space utilization, and restores the manipulator. Tactile sensation is the research target of the present invention

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