Cleaning and washing method of laser drilled aluminum nitride ceramic plate

A technology of aluminum nitride ceramics and laser drilling, which is applied in the direction of cleaning methods using liquids, cleaning methods and utensils, chemical instruments and methods, etc., and can solve micropore edge collapse, scratches on the surface of aluminum nitride ceramics, very Difficult to clean and other problems, to achieve the effect of reducing damage, better control of production process, and improving cleaning efficiency

Active Publication Date: 2020-03-27
GUANGDONG GASTIGHT HERMETICAL COMPONENT
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0002] After aluminum nitride ceramics are laser drilled, the slag produced by high-temperature melting will stick to the surface of the ceramic and the micropores. These slags have a certain thickness and hardness and are difficult to clean
At present, the method of first scraping off the slag on the surface with a scraper, and then cleaning the slag in the micropores with alkali is easy to cause scratches on the surface of aluminum nitride ceramics, the edge of the micropores is broken, and the cleaning time is long and the production efficiency is low. The inner wall of the micropores is not easy to clean, and the alkali cleaning concentration is too high and the time is too long, which will cause corrosion on the surface of aluminum nitride ceramics, and the production process is not easy to control

Method used

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Examples

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Effect test

Embodiment 1

[0037] A piece of aluminum nitride ceramic plate with a size of 114.3 mm in length, 114.3 mm in width and 0.5 mm in thickness was drilled with a laser drilling machine into 2400 micro-holes with a diameter of 0.1 mm on the ceramic plate. The cleaning method of slag on the ceramic plate includes the following steps: 1. Pre-soaking. Soak the laser-drilled aluminum nitride ceramic plate in sulfuric acid with a volume ratio of 30% for 2 hours. 2. Scrubbing: gently wipe off the surface of the ceramic plate with a cloth soaked in pure water. 3. For the first ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 5 minutes. 4. Soak the aluminum nitride ceramic plate in volume ratio In 10% sulfuric acid, soak for 4 hours. 5. For the second ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 5 minutes. 6. Natron, soak the ceramic plate in 5% by weight In sodium hydroxide solution, soak for 2 hours. 7. For the third ultrasonic...

Embodiment 2

[0039] A piece of aluminum nitride ceramic plate with a size of 50.8 mm in length, 50.8 mm in width, and 0.2 mm in thickness is drilled with a laser drilling machine into 1600 micro-holes with a diameter of 0.05 mm on the ceramic plate. The cleaning method of slag on the ceramic plate includes the following steps: 1. Pre-soaking. Soak the laser-drilled aluminum nitride ceramic plate in sulfuric acid with a volume ratio of 20% for 2 hours. 2. Scrubbing: gently wipe off the surface of the ceramic plate with a cloth soaked in pure water. 3. For the first ultrasonic cleaning, put the ceramic plate in absolute ethanol or isopropanol and ultrasonically clean it for 3 minutes. 4. Soak the aluminum nitride ceramic plate in volume ratio In 5% sulfuric acid, soak for 2 hours. 5. For the second ultrasonic cleaning, place the ceramic plate in absolute ethanol or isopropanol for 3 minutes. 6. Natron, soak the ceramic plate in 2% by weight In sodium hydroxide solution, soak for 1 hour. 7. F...

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Abstract

The invention discloses a cleaning and washing method of a laser drilled aluminum nitride ceramic plate. The cleaning and washing method comprises the following steps that firstly, a drilled aluminumnitride ceramic sheet is soaked with acid, oxide in molten slags reacts with the acid, the molten slags bonded on the aluminum nitride ceramic plate generate holes to be soft, and the molten slags onthe surface of the ceramic plate can be removed only by gently wiping with cloth, so that the damage to the ceramic sheet caused by a scraper is reduced; in the middle of the cleaning, the large softmolten slags can fall off through the multiple times of ultrasonic cleaning and washing, so that the acid can conveniently react with the inner layer molten slags, the cleaning and washing process isaccelerated, and the cleaning and washing efficiency is improved; and low-concentration alkali is used for soaking for short time, the alkali slightly reacts with the surface of the aluminum nitride ceramic sheet, then the molten slags in micro-holes can be completely cleared and washed, the phenomena that the surface of the aluminum nitride ceramic plate is corroded with pits and the roughness isexcessive due to too high alkali washing concentration and too long time are avoided, and no residue of the molten slags in the micro-holes is guaranteed. All the ultrasonic cleaning and washing is performed by placing the aluminum nitride ceramic plate in absolute ethyl alcohol or isopropanol for the ultrasonic cleaning and washing, and the aluminum nitride plate is free of reaction with the absolute ethyl alcohol and the isopropanol, so that the production process is better controlled.

Description

technical field [0001] The invention relates to the technical field of cleaning ceramic plates, in particular to a cleaning method for laser perforated aluminum nitride ceramic plates. Background technique [0002] After aluminum nitride ceramics are laser drilled, the slag produced by high-temperature melting will bond on the surface of the ceramic and in the micropores. These slags have a certain thickness and hardness and are difficult to clean. At present, the method of first scraping off the slag on the surface with a scraper, and then cleaning the slag in the micropores with alkali is easy to cause scratches on the surface of aluminum nitride ceramics, the edge of the micropores is broken, and the cleaning time is long and the production efficiency is low. The inner wall of the micropores is not easy to clean, and the alkali washing concentration is too high and the time is too long, which will cause corrosion on the surface of aluminum nitride ceramics, and the produc...

Claims

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Application Information

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IPC IPC(8): B08B3/08B08B3/12B08B3/02B08B13/00F26B21/14C23G1/12C23G1/22
CPCB08B3/02B08B3/08B08B3/12B08B13/00C23G1/125C23G1/22F26B21/14
Inventor 徐雅琼温梦帆
Owner GUANGDONG GASTIGHT HERMETICAL COMPONENT
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