Crawling piezoelectric precision driving device based on asymmetric triangular flexible hinge mechanism

Abstract

The invention relates to a crawling piezoelectric precision driving device based on an asymmetric triangular flexible hinge mechanism. The device consists of two groups of piezoelectric stacks, two groups of asymmetric triangular flexible hinge mechanisms, a mover, a pre-tightening screw, a pre-tightening wedge and a base. The two groups of piezoelectric stacks can be elongated and recovered underthe driving of voltage signals. The two groups of asymmetric triangular flexible hinge mechanisms can realize parasitic inertial motion. The pre-tightening screw and the pre-tightening wedge adjust the initial pre-tightening force between the asymmetric triangular flexure hinge mechanism and the mover. The base acts as a support. The two piezoelectric stacks alternately drive under the voltage sequence control so that the asymmetric triangular flexible hinge mechanisms perform bionic crawling movement, thus increasing the output load, eliminating the backward phenomenon of the mover in the movement period, improving the output performance of the device and realizing the linear movement of the mover. The device can be applied to the fields of ultra-precision machining, micro-electromechanical systems, micro-operation robots and biotechnology.

Description

technical field [0001] The invention relates to the fields of precision ultra-precision machining, micro-nano manipulating robots, and micro-electromechanical system engineering, and in particular to a creeping piezoelectric precision drive device based on an asymmetrical triangular flexible hinge mechanism. Background technique [0002] Precision drive technology with micro / nano-level positioning accuracy is a key technology in high-tech fields such as ultra-precision machining and measurement, optical engineering, modern medical care, and aerospace technology. In order to achieve micro / nano-level output accuracy, the application of modern precision drive technology puts forward higher requirements for the accuracy of the drive device. The traditional driving device has low output accuracy and large overall size, which cannot meet the requirements of micro / nano-level high precision and small size of the driving device in the precision system of modern advanced technology. ...

AI Technical Summary

Problems solved by technology

Piezoelectric elements, however, such as piezo stacks, typically use d 33 In the working mode, the stiffness of the section perpendicular to the main output direction is small, and the pre-tightening force generated is small, resulting in a large reduction in the output load of the overall device, and the large stiffness of the piezoelectric element in the main output direction has not been fully utilized. Utilization; a single piezo stack provides low output load; back-off phenomenon in motion further degrades output performance

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