Improved Offner optical system for detecting ultra-large-aperture concave aspheric mirror
An Ofner, ultra-large aperture technology, applied in the direction of using optical devices, measuring devices, instruments, etc., can solve the problems of large compensator aperture and difficult to obtain materials, and achieve excellent image quality, easy parts processing, and high inspection accuracy. Effect
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[0019] The present invention proposes an improved Offner inspection optical system for super-large-diameter concave aspheric mirrors, and the main technical indicators are as follows:
[0020] 1. Aperture ratio of the first compensator to the concave aspheric mirror to be inspected: 0.025;
[0021] 2. The ratio of the total incident ray aperture angle to the exit ray aperture angle of the compensation lens β=-1.71, and the ratio β of the incident ray aperture angle to the exit ray aperture angle of the first compensation lens 1 =-2.16, the ratio β of the incident ray aperture angle to the exit ray aperture angle of the second compensation lens 2 =0.79;
[0022] 3. The test aspheric surface diameter is 13.98m, the radius of curvature is 40m, and the relative aperture is 1 / 1.43;
[0023] 4. Check that the optical wave aberration PV value is better than 0.1λ (λ=633nm), and the RMS wave aberration is better than 0.025λ (λ=633nm).
[0024] The design parameters of the optical sy...
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