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Method and system for detecting laser damage based on optical element

A technology for optical components and laser damage, which is applied in the field of optical measurement and can solve problems such as low detection accuracy and detection errors

Pending Publication Date: 2020-02-04
LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, in practice, it is found that the detection accuracy of the traditional laser damage testing method is low, and sometimes even detection errors occur.

Method used

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  • Method and system for detecting laser damage based on optical element
  • Method and system for detecting laser damage based on optical element
  • Method and system for detecting laser damage based on optical element

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0046] Please see figure 1 , figure 1 A schematic flowchart of a laser damage detection method based on an optical element is provided for an embodiment of the present application. This method is applied to the scene of laser damage detection of optical components, and can be specifically applied to scenes such as laboratories. Among them, the laser damage detection method based on optical components includes:

[0047] S101. Control the first light source and the second light source to illuminate the optical element.

[0048]In this embodiment, the first light source may be a bright field light source, and the second light source may be a dark field light source.

[0049] In this embodiment, the first light source is an incoherent light source, and the second light source is a collimated laser source.

[0050] In this embodiment, the first light source and the second light source can move the optical element during the process of illuminating the optical element, wherein t...

Embodiment 2

[0069] Please see figure 2 , figure 2 It is a schematic flowchart of another optical element-based laser damage detection method provided in the embodiment of the present application. figure 2 The schematic flowchart of the described optical element-based laser damage detection method is based on figure 1 The schematic flow chart of the described optical element-based laser damage detection method is improved. Among them, the laser damage detection method based on optical components includes:

[0070] S201. Set the first light source and the second light source with preset light source setting parameters.

[0071] In this embodiment, light intensity, light irradiation position, light source visit position, etc. can all be determined as light source setting parameters.

[0072] In this embodiment, in order to increase the scattered light intensity of the laser damage point and improve the detection accuracy, the laser is illuminated forwardly, and the angle A between the...

Embodiment 3

[0096] Please see image 3 , image 3 A schematic structural diagram of a laser damage detection system based on an optical element provided in an embodiment of the present application. Among them, the laser damage detection system based on optical components includes:

[0097] The control unit 310 is configured to control the first light source and the second light source to illuminate the optical element.

[0098] The acquiring unit 320 is configured to acquire an illumination image of the optical element.

[0099] The processing unit 330 is configured to perform image enhancement processing on the illumination image to obtain a detection image.

[0100] The output unit 340 is configured to output the detection image.

[0101] In this embodiment, the optical element-based laser damage detection system may refer to any explanations described in Embodiment 1 or Embodiment 2, which is not limited in this embodiment.

[0102] Visible, implemented image 3 The described opt...

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Abstract

Embodiments of the application provide a method and system for detecting laser damage based on an optical element, and relate to the technical field of optical measurement. The method comprises the following steps of controlling a first light source and a second light source to illuminate the optical element; obtaining an illumination image of the optical element; subjecting the illumination imageto image enhancement processing to obtain a detection image; and outputting the detection image. Implementing this embodiment can improve the laser damage detection accuracy of the optical element and avoid a certain detection error.

Description

technical field [0001] The present application relates to the technical field of optical measurement, in particular, to a laser damage detection method and system based on optical elements. Background technique [0002] At present, in the optical field, laser damage tests are usually performed on optical components such as fused silica and KDP crystals. In traditional laser damage tests, high-energy lasers are usually used to irradiate optical components until damage occurs on the surface or in the body of the optical component. The damage evaluation of the optical components is carried out by the staff. However, it has been found in practice that the detection accuracy of the traditional laser damage testing method is low, and sometimes detection errors may even occur. Contents of the invention [0003] The purpose of the embodiments of the present application is to provide a laser damage detection method and system based on optical components, which can improve the accu...

Claims

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Application Information

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IPC IPC(8): G01N21/95G01N21/958G01N21/88
CPCG01N21/95G01N21/958G01N21/8806G01N2021/9511G01N2021/9583G01N2021/8887
Inventor 张健李亚国樊非张清华王健许乔
Owner LASER FUSION RES CENT CHINA ACAD OF ENG PHYSICS
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