Arc striking device for ion plating and ion plating device

Abstract

The invention discloses an arc striking device for ion plating and an ion plating device, and relates to the technical field of ion plating. The arc striking device comprises an arc striking hook, a connecting rod, a corrugated pipe, a drive device and a sealing insulating part. A mounting hole is formed in the side wall of a vacuum chamber of the ion plating device, the sealing insulating part isfixed into the mounting hole and connected with the mounting hole in a sealed manner, an output shaft of the drive device penetrates through the sealing insulating part to be fixedly connected with one end of the connecting rod, the drive device can drive the connecting rod to reciprocate in the axial direction, one end of the corrugated pipe is fixedly connected with one end of the sealing insulating part, the other end of the corrugated pipe fixedly sleeves the connecting rod and is connected with the connecting rod in a sealed manner, and the connecting rod penetrates through the corrugated pipe to be fixedly connected with the arc striking hook. The ion plating device comprises the vacuum chamber and the arc striking device for ion plating. The drive device drives the arc striking hook to move, acting force is large, hook adhesion is not easily caused, the corrugated pipe is arranged for static sealing, the sealing performance of the vacuum chamber is good, and vacuum is not easily damaged.

Description

technical field [0001] The invention relates to the technical field of ion plating, in particular to an arc striking device for ion plating and an ion plating device. Background technique [0002] In the field of multi-arc ion coating, there are two commonly used arc ignition devices. One is the electric arc ignition device for coil arc ignition. The coil is energized to generate a magnetic field to drive the arc ignition hook to move. After the arc ignition is successful, the coil is powered off and The arc hook is reset by the spring to realize the reciprocating movement of the arc hook. Although this kind of scheme can ensure the sealing, the magnetic field generated by the coil electrification is small, and the elastic force of the spring matching it is also small, which not only makes the arc hook The movement stroke is short, and it is very easy to cause the arc hook to stick due to the heating of the arc, resulting in the inability of the arc hook to rebound, resultin...

AI Technical Summary

Problems solved by technology

[0002] In the field of multi-arc ion coating, there are two commonly used arc ignition devices. One is the electric arc ignition device for coil arc ignition. The coil is energized to generate a magnetic field to drive the arc ignition hook to move. After the arc ignition is successful, the coil is powered off and The arc hook is reset by the spring to realize the reciprocating movement of the arc hook. Although this kind of scheme can ensure the sealing, the magnetic field generated by the coil electrification is small, and the spring force matched with it is also small, which not only makes the arc hook The movement stroke is short, and it is very easy to cause the arc hook to stick due to the heating of the arc, resulting in the inability of the arc hook to rebound, resulting in a short circuit; Compressed air, the cylinder shaft drives the arc strike hook to reciprocate. Although this scheme has a long stroke of the arc strike hook and a large power for ion coating, it is not easy to stick the hook, but the seal with the skeleton oil seal is a dynamic seal, and the cylinder shaft Long-term friction with the skeleton oil seal makes the sealing part prone to air leakage and destroys the vacuum in the vacuum chamber

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