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Antireflective member and method of manufacture therefor

An anti-reflection and anti-reflection layer technology, applied in chemical instruments and methods, optical components, sputtering plating, etc., can solve the problems of insufficient steel wool resistance and low dynamic friction.

Active Publication Date: 2019-12-03
SHIN ETSU CHEM IND CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0010] Even if the treatment agent described in Patent Document 1 is applied to the multilayer antireflection film, the steel wool resistance and low dynamic friction are not sufficient

Method used

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  • Antireflective member and method of manufacture therefor
  • Antireflective member and method of manufacture therefor
  • Antireflective member and method of manufacture therefor

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1～4 and comparative example 1

[0284] In Examples 1 to 4 and Comparative Example 1, compounds 1 to 5 (changing the number average molecular weight of the water and oil repellent) were applied to the substrate A (RMS: 0.82 nm) to form a water and oil repellent layer based on the above method. The above-mentioned evaluation was performed, and the evaluation results are shown in Table 2.

[0285] [Table 2]

[0286]

[0287] Comparative Example 1 using Compound 5 having a number average molecular weight of the main chain (fluoropolymer part) of less than 4500 was affected by surface irregularities, resulting in a high coefficient of dynamic friction and poor wear resistance. On the other hand, Examples 1 to 4 using a compound whose main chain (fluoropolymer part) has a number average molecular weight of 4,500 or more had a coefficient of dynamic friction of 0.05 or less and good wear resistance.

Embodiment 5～7 and comparative example 2

[0289] In Examples 5 to 7 and Comparative Example 2, the compound 3 (number average molecular weight: 7280) was used for the above-mentioned substrates B to E respectively based on the above-mentioned method to form water and oil repellent layers. The above-mentioned evaluation was performed, and the evaluation results are shown in Table 3 together with the results of the above-mentioned Example 3 (using the substrate A and the compound 3).

[0290] [table 3]

[0291]

[0292] Comparative Example 2 in which the RMS of the surface of the multilayer antireflection layer is larger than 2.0nm, even if a compound with a large number average molecular weight of the main chain (fluoropolymer part) is used, the influence of surface irregularities cannot be buried, and the coefficient of dynamic friction is high and wear-resistant Poor damage. On the other hand, in Examples 3 and 5 to 7 in which the RMS of the surface of the multilayer antireflection layer was 2.0 nm or less, the d...

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Abstract

The present invention provides an antireflective material that has a water- and oil-repellant layer on a multi-layered antireflective layer and is capable of exhibiting excellent surface lubricity, water- and oil-repellant properties, and durability. The surface of the multi-layered antireflective layer on a base material has a root-mean-square surface roughness of 0.8 nm to 2.0 nm. The water- andoil-repellant layer has a thickness of 1 to 30 nm and is a cured product of water- and oil-repellents having as principal components a fluorooxyalkylene group-containing polymer modified organosilicon compound with the numerical average molecular weight of 4,500 to 10,000 of a fluoropolymer part and / or partial hydrolysis condensate thereof.

Description

technical field [0001] The present invention relates to an anti-reflection member and a method for producing the same. Specifically, it relates to a multi-layer anti-reflection layer having a root-mean-square surface roughness of 0.8 nm or more and 2.0 nm or less on the surface of the multi-layer anti-reflection layer on a substrate. Cured product of a water and oil repellent agent mainly composed of a polymer-modified organosilicon compound containing a fluorooxyalkylene group having a number average molecular weight of the fluoropolymer part of 4,500 to 10,000 and / or its partial hydrolysis condensate That is, an antireflection member having a waterproof and oil-repellent layer with a film thickness of 1 to 30 nm, excellent surface slip properties, water and oil repellency, and durability. Background technique [0002] In recent years, in order to improve the appearance and visibility, there has been an increasing demand for technologies that make it difficult for fingerpri...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B1/18B32B9/00B32B27/00C09D171/02C23C14/06G02B1/115
CPCB32B9/00B32B27/00G02B1/115G02B1/18C08G65/336C08G65/007C09D171/00C03C23/006C03C23/0075C03C2218/31C03C17/42C03C2217/78C03C2217/73C03C2217/75C03C2217/76B05D1/60B05D1/62B05D5/06B05D5/083B05D2203/35B05D2506/10B05D2518/12C09D171/02C23C14/06C03C2217/734C03C2218/151C03C2218/154C23C14/083C23C14/10C23C14/24C23C14/34C03C17/30C03C2217/213
Inventor 山根祐治片山理佐酒匈隆介松田高至
Owner SHIN ETSU CHEM IND CO LTD
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