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A temperature sensor based on an organic field effect tube and its preparation method

A temperature sensor, organic field technology, applied in thermometers, semiconductor/solid-state device manufacturing, thermometers with electrical/magnetic components directly sensitive to heat, etc., can solve the problem of low mobility and unsatisfactory stability of biosemiconductor materials and other problems, to achieve the effect of improving the temperature sensing response, rich content and easy induction

Active Publication Date: 2021-05-28
UNIV OF ELECTRONICS SCI & TECH OF CHINA
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] It is well known that most biosemiconductor materials have low mobility and unsatisfactory stability.

Method used

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  • A temperature sensor based on an organic field effect tube and its preparation method
  • A temperature sensor based on an organic field effect tube and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0036] Such as figure 1 As shown, a temperature sensor based on an organic field effect tube is a bottom-gate top-contact structure, and the materials and thicknesses of each layer are: the gate electrode 2, the source electrode 5 and the drain electrode 6 are all silver nanowires, and the biodielectric layer 3 It is gelatin with a thickness of 200nm. The doped semiconductor layer 4 is composed of indigo and pectin (10% by weight of pectin) with a thickness of 50nm. The shellac encapsulation layer 7 has a thickness of 300nm. A field effect transistor temperature sensor with high sensitivity and high stability can be realized by using the structure.

[0037] A temperature sensor based on an organic field effect tube is a bottom grid top contact structure, comprising the following steps:

[0038] ① Clean the substrate 1 with detergent, acetone solution, deionized water and isopropanol solution, and dry it with nitrogen after cleaning;

[0039] ②Preparing a silver nanowire grid...

Embodiment 2

[0047] Such as figure 1 As shown, a temperature sensor based on an organic field effect tube is a bottom-gate top-contact structure, and the materials and thicknesses of each layer are: the gate electrode 2, the source electrode 5 and the drain electrode 6 are all gold nanowires, and the biodielectric layer 3 It is silk protein with a thickness of 500nm. The doped semiconductor layer 4 is composed of carotene and pectin (50% by weight of pectin) and has a thickness of 70nm. The shellac encapsulation layer 7 has a thickness of 200nm. A field effect transistor temperature sensor with high sensitivity and high stability can be realized by using the structure.

[0048] A temperature sensor based on an organic field effect tube is a bottom grid top contact structure, comprising the following steps:

[0049] ① Clean the substrate 1 with detergent, acetone solution, deionized water and isopropanol solution, and dry it with nitrogen after cleaning;

[0050] ②Preparing a gold nanowir...

Embodiment 3

[0057] Such as figure 1 As shown, a temperature sensor based on an organic field effect tube is a bottom-gate top-contact structure, and the materials and thicknesses of each layer are: the gate electrode 2, the source electrode 5 and the drain electrode 6 are all indium nanowires, and the biodielectric layer 3 Mined as egg white with a thickness of 300nm, the doped semiconductor layer 4 is a mixture of indigo and pectin (15% by weight of pectin), with a thickness of 60nm, and the shellac encapsulation layer 7 has a thickness of 250nm. A field effect transistor temperature sensor with high sensitivity and high stability can be realized by using the structure.

[0058] A temperature sensor based on an organic field effect tube is a bottom grid top contact structure, comprising the following steps:

[0059] ① Clean the substrate 1 with detergent, acetone solution, deionized water and isopropanol solution, and dry it with nitrogen after cleaning;

[0060] ②Preparing a silver na...

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Abstract

The invention discloses a temperature sensor based on an organic field effect tube and a preparation method thereof. The temperature sensor is a bottom-gate top-contact structure, and the temperature sensor is sequentially composed of a substrate, a biodielectric layer, and a doped semiconductor from bottom to top. A layer and an encapsulation layer, the biodielectric layer has a gate electrode on the upper surface of the substrate, the upper surface of the doped semiconductor layer is respectively provided with a source electrode and a drain electrode, and the doped semiconductor layer The material is a hybrid material composed of pectin and biosemiconductor materials. The extracted pectin works synergistically with bio-semiconductor materials and is sensitive to temperature; when mixed with bio-semiconductor materials and pectin, when the temperature changes, the electrical conductivity will change greatly, which will cause changes in the mobility and contact resistance of semiconductor materials, thereby Its electrical properties have changed greatly, and it is easier to sense the temperature of the outside world, which improves the temperature sensing response of the organic field effect tube, and realizes the highly sensitive and high-response detection of the device for temperature.

Description

technical field [0001] The invention belongs to the technical field of sensor preparation, and in particular relates to an organic field effect tube temperature sensor based on a biological material-doped semiconductor layer. Background technique [0002] The application fields of sensors are very broad. It can be said that from space to the ocean, from various complex engineering systems to people's daily necessities of life, all kinds of sensors are inseparable. Sensing technology plays an increasingly important role in the development of the national economy. Huge effect. Among them, temperature is a physical quantity that represents the degree of coldness and heat of an object, and is a very important and common measurement parameter in the process of industrial and agricultural production. Therefore, the development of temperature sensors plays a very important role in ensuring product quality, improving production efficiency, saving energy, production safety, and prom...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01K7/00H01L51/05H01L51/40
CPCG01K7/00H10K10/46
Inventor 于军胜侯思辉张晓华赵世雄
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA
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