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Ultra-high-resolution color filter based on hydrogenated amorphous silicon metasurface and preparation method and application thereof

A hydrogenated amorphous silicon, ultra-high-resolution technology, applied in the field of ultra-high-resolution color filters, can solve the problems of metal conduction loss, difficult to realize transmission-type color filters, etc., achieve low optical loss, improve optical Utilization efficiency, easy processing effect

Pending Publication Date: 2019-11-26
UNIV OF JINAN
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, metals in plasmonic metasurfaces will produce unavoidable conduction loss, which makes it difficult to realize high-efficiency transmissive color filters. As a result, the high-efficiency metasurface color filters reported so far only work in reflective mode.

Method used

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  • Ultra-high-resolution color filter based on hydrogenated amorphous silicon metasurface and preparation method and application thereof
  • Ultra-high-resolution color filter based on hydrogenated amorphous silicon metasurface and preparation method and application thereof
  • Ultra-high-resolution color filter based on hydrogenated amorphous silicon metasurface and preparation method and application thereof

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Embodiment 1

[0042] refer to figure 1 , a transmissive and reflective three-color filter based on a hydrogenated amorphous silicon metasurface, comprising: a transparent substrate 1, a transparent cover layer 2, and a dielectric metasurface; wherein, the dielectric metasurface is a nano-column structure Hydrogenated amorphous silicon (i.e. hydrogenated amorphous silicon nanocolumns 3), which is distributed on the surface of the transparent substrate 1 in an array structure; the transparent covering layer 2 covers the medium metasurface, thereby sealing the medium metasurface in the transparent in the covering layer. The medium metasurface is composed of three sets of arrays, and each set of arrays contains several nanopillars distributed in arrays.

Embodiment 2

[0044] An ultra-high-resolution color filter based on hydrogenated amorphous silicon metasurface, the same as embodiment 1, the difference is that: the material of the transparent substrate is glass with high transmittance, and the material of the transparent cover layer is Transparent PMMA; the height of the nanocolumns is 80nm, and the diameters and periods corresponding to the three primary colors of transmission CMY and reflection RGB are 170, 130, 80nm and 400, 350, 120nm respectively.

Embodiment 3

[0046] A kind of super high-resolution color filter based on hydrogenated amorphous silicon metasurface, with embodiment 1, difference is: the material of described transparent substrate is PMMA with high transmittance, the material of described transparent cover layer is Transparent PDMS; the height of the nanocolumns is 120nm, and the diameters and periods corresponding to the three primary colors of transmission CMY and reflection RGB are 130, 100, 60nm and 400, 200, 80nm respectively.

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Abstract

The invention relates to the technical field of ultra-high-resolution color filters, in particular to an ultra-high-resolution color filter based on a hydrogenated amorphous silicon metasurface and apreparation method and application thereof. The antenna comprises a transparent substrate, a dielectric metasurface and a transparent covering layer. The dielectric metasurface is hydrogenated amorphous silicon with a nanorod structure and is distributed on the surface of the transparent substrate in an array structure. The transparent covering layer covers the dielectric metasurface to seal the dielectric metasurface in the transparent covering layer. According to the invention, the color filter can work in a transmission mode and a reflection mode at the same time, so that the light utilization efficiency is remarkably improved; and after simple adjustment of the structural parameters of a single sub-wavelength structure in the metasurface, the full-color ultrahigh-resolution color printing can be realized.

Description

technical field [0001] The invention relates to the technical field of ultra-high-resolution color filters, in particular to an ultra-high-resolution color filter based on a hydrogenated amorphous silicon metasurface and its preparation method and application. Background technique [0002] In the Background of the Invention, the disclosed information is only intended to increase the understanding of the general background of the present invention, and is not necessarily to be regarded as an acknowledgment or in any form to imply that the information constitutes the prior art already known to those skilled in the art. [0003] Color filter is a common optical element that presents different colors by selectively reflecting or transmitting specific wavelengths in the visible light spectrum. It is widely used in display imaging, sensing detection, photovoltaic devices, color holography, ink-free Color printing and other fields. Compared with traditional color filters based on ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G02B5/20
CPCG02B5/20
Inventor 岳文静李阳高嵩张春伟付小倩
Owner UNIV OF JINAN
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