Flat-bottom guide cylinder of czochralski silicon single crystal furnace

Abstract

The invention provides a flat-bottom guide cylinder of a czochralski silicon single crystal furnace. The guide cylinder comprises a guide cylinder side wall part, a guide cylinder transition part anda guide cylinder flat bottom part, wherein the guide cylinder side wall part, the guide cylinder transition part and the guide cylinder flat bottom part are sequentially connected; the guide cylinderside wall part, the guide cylinder transition part and the guide cylinder flat bottom part are of annular structures, the diameter of the guide cylinder flat bottom part is smaller than that of the guide cylinder side wall part, and the guide cylinder flat bottom part and the guide cylinder side wall part are coaxially arranged, so that a gap between the liquid level of a silicon solution and theguide cylinder is reduced. The flat-bottom guide cylinder is provided with the guide cylinder flat bottom, so that the gap drop between the guide cylinder and the liquid level is small, the gas flow rate is increased, volatilized oxygen can be rapidly taken away, the oxygen content of large-size single crystals can be effectively reduced, and the quality of the large-size single crystals is improved.

Description

technical field [0001] The invention belongs to the technical field of Czochralski single crystal, and in particular relates to a flat-bottom guide cylinder of a Czochralski silicon single crystal furnace. Background technique [0002] Czochralski growth of single crystal silicon is currently the most widely used technology for the production of single crystal silicon. With the intensification of market competition, the quality requirements for single crystals are more stringent, and the quality requirements for large-size single crystals are higher. Therefore, current monocrystalline silicon manufacturers need higher quality. In order to maintain the normal growth of single crystal, it is necessary to increase the guide tube, so the guide tube has become one of the important systems of the current Czochralski single crystal furnace. The main functions of the guide tube are: [0003] First, isolate the thermal radiation of the heater to the single crystal, ensure the tempe...

AI Technical Summary

Problems solved by technology

[0005] Its disadvantages are: the structure of the existing guide tube is a bowl-shaped structure, with a side wall and an arc section connected to the bottom of the side wall, so there is a large gap above the liquid surface, and the gas flow rate is low. , the volatilization area of ​​the liquid surface decreases, resulting in a high oxygen content

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