Phase recovery detection device and phase recovery method based on Fresnel zone plate diffraction information fusion

Abstract

The invention discloses a phase recovery detection device and a phase recovery method based on Fresnel zone plate diffraction information fusion. The device includes a laser, an attenuation mirror, amicroscope objective, a small-hole filter, a collimating objective, a to-be-measured component, a Fresnel zone plate, and an image acquisition device, which are sequentially arranged along a directionof an optical path. The device utilizes the Fresnel zone plate instead of a traditional lens as a light beam convergence component, and utilizes a multi-focal characteristic of the Fresnel zone plateto make a collected diffraction light spot contain more diffraction information. The method performs recovery by utilizing diffracted light intensity distribution modulated by the Fresnel zone plate,and can achieve reconstruction of a to-be-measured wavefront wider frequency band. The device is simple and can achieve acquisition of diffraction information in a wide frequency band without changing a defocus position, and the method has higher algorithm convergence speed and wavefront reconstruction precision, and is high in precision when a large wavefront errors in the wide frequency band isdetected.

Description

technical field [0001] The invention relates to the technical field of optical detection, in particular to a phase recovery detection device and a phase recovery method based on Fresnel zone plate diffraction information fusion. Background technique [0002] Various high-precision and high-quality optical components are widely used in modern large-scale optical systems such as large lasers and space telescopes. In actual use, in order to meet the high power and high energy requirements of the system, the optical components themselves need to have better surface quality. The surface quality determines the performance of the optical system. When modern optical processing methods process optical components, processing errors of different frequencies will remain on the surface of the components. According to its spatial frequency, it can be roughly divided into low frequency, medium frequency and high frequency errors. Low-frequency errors are mainly presented in the form of ...

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Problems solved by technology

[0004] The purpose of the present invention is to address the deficiencies in the prior art, to provide a phase recovery detection device and a phase recovery method based on Fresnel zone plate diffraction information fusion, to alleviate the recovery frequency band in the wavefront reconstruction process of the traditional phase recovery method narrow question

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