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Variable diameter flow guide cylinder for single crystal furnace

A single crystal furnace and flow guide technology, applied in the direction of single crystal growth, single crystal growth, crystal growth, etc., can solve the problems of increasing cost, affecting the quality of crystal pulling, and large process variation, and achieving good consistency.

Pending Publication Date: 2019-11-12
包头美科硅能源有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

When pulling large-sized crystals, such as 9-inch and 10-inch crystals, it is necessary to replace the guide tube with a relatively large inner diameter, which increases the cost. Due to the change in the size of the guide tube, the process changes greatly and affects the quality of crystal pulling.

Method used

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  • Variable diameter flow guide cylinder for single crystal furnace
  • Variable diameter flow guide cylinder for single crystal furnace

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Embodiment Construction

[0029] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific preferred embodiments.

[0030] In the description of the present invention, it should be understood that the orientations or positional relationships indicated by the terms "left side", "right side", "upper", "lower" are based on the orientations or positional relationships shown in the accompanying drawings, and are only For the purpose of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation, "first", "second" and the like do not represent components importance, and therefore should not be construed as limiting the invention. The specific dimensions used in this embodiment are only for illustrating the technical solution, and do not limit the protection scope of the present in...

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Abstract

The invention discloses a variable diameter flow guide cylinder for a single crystal furnace. The variable diameter flow guide cylinder comprises a heat shield outer liner, a heat shield inner liner and a thermal insulation material, wherein the heat shield outer liner comprises an upper heat shield and a lower heat shield, the upper heat shield and the lower heat shield are integrally arranged, the lower end of the lower heat shield is provided with an overlapping table, the minimum inner diameter of the overlapping table is larger than the maximum size of a to-be-drawn crystal, the heat shield inner liner comprises a carbon-carbon upper ring and a graphite ring, the carbon-carbon upper ring is an inverted tapered round table, the length of the carbon-carbon upper ring is not smaller thanthe vertical length of the upper heat shield, the graphite ring comprises a hollow inverted tapered round table 1 and a hollow inverted tapered round table 2, the hollow inverted tapered round table1 and the hollow inverted tapered round table 2 are sequentially arranged from top to bottom and are arranged integrally, the top end of the inverted tapered round table 1 contacts or forms snapped connection with the bottom end of the carbon-carbon upper ring, the bottom portion of the inverted tapered round table 2 is provided with an overlapping part, and the overlapping part is placed on the overlapping table of the lower heat shield. According to the present invention, the graphite ring with the corresponding specification is directly replaced according to the size of the to-be-drawn crystal, such that a set of the flow guide cylinder can be adapted to the size drawing of crystals with various specifications and models so as to save the cost, and the drawing process cannot be changedso as to achieve the good quality consistency of the drawn crystal.

Description

technical field [0001] The invention relates to the photovoltaic manufacturing industry, in particular to a variable-diameter draft tube for a single crystal furnace. Background technique [0002] The conventional size of the current single crystal furnace is about 8.5 inches for both the furnace type and the thermal field. However, with the start of grid parity in the photovoltaic industry and the accelerated iterative innovation of large-size monocrystalline products, the photovoltaic manufacturing industry as a whole has felt the new changes in the market. [0003] Under the new situation that the industry is moving towards bidding without subsidies, the value of large-size products has become increasingly prominent. [0004] "From the perspective of production line compatibility, market demand and product reliability, large silicon wafers will be one of the main development routes in 2019." The biggest advantage of large-sized silicon wafers is that they hardly increase...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C30B15/00C30B29/06
CPCC30B15/00C30B29/06
Inventor 孟涛王海庆姚亮
Owner 包头美科硅能源有限公司
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