MEMS gyroscope parameter identification driving control method based on data screening
A technology of data screening and parameter identification, which is applied in the direction of adaptive control, general control system, control/regulation system, etc., and can solve the problem of strict continuous excitation requirements for identification parameters
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[0056] Now in conjunction with embodiment, accompanying drawing, the present invention will be further described:
[0057] The invention discloses a MEMS gyroscope parameter identification driving control method based on data screening, combining figure 1 , the specific design steps are as follows:
[0058] (a) The MEMS gyro dynamics model considering the existence of orthogonality error is:
[0059]
[0060] Among them, m is the mass of proof mass, Ω z Enter the angular velocity for the gyro, and x * are the acceleration, velocity and displacement of the MEMS gyroscope proof mass along the drive axis, respectively, and y * are the acceleration, velocity and displacement along the detection axis, respectively, with is the electrostatic driving force, c xx and c yy is the damping coefficient, k xx and k yy is the stiffness coefficient, with is the nonlinear coefficient, c xy and c yx is the damping coupling coefficient, k xy and k yx is the stiffness c...
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