Interference type VCSEL laser device applied to chip level atomic clock and atomic magnetometer

Abstract

The invention provides an interference type VCSEL laser device applied to a chip level atomic clock and an atomic magnetometer. Filtering / feedback film groups and a partial reflection film are arranged on an output light end face, the filtering / feedback film groups comprise a plurality of high refraction index material and low refraction index material film layers, a single wave length light beam is obtained through frequency selection of the filtering / feedback film groups for a coherent light beam output by a VCSEL laser chip and then is reflected by the partial reflection film, and reflected light is oscillated inside a resonant cavity composed of the output light end face and the filtering / feedback film groups and amplified to exceed an oscillation threshold value. The VCSEL laser chip and the multiple layers of filtering / feedback film groups with filtering and outer cavity feedback functions integrally are integrated into one body, a small and integrated laser device with narrow line width is obtained, and the interference type VCSEL laser device has the characteristics of simple structure, low production cost, high interference immunity and narrow line width, so that the device is applicable for chip level atomic optical devices and realizes batch production.

Description

[0001] 【Technical field】 [0002] The invention relates to semiconductor laser technology, in particular to an interference type VCSEL laser applicable to chip-level atomic clocks and atomic magnetometers. [0003] 【Background technique】 [0004] The development of atom-on-chip optical devices benefits from the technology of modulating single-frequency micro-semiconductor lasers, that is, a light source that can simultaneously satisfy narrow linewidth, low power consumption, modulating, and single mode is needed to excite alkali metal atoms. Due to its narrow linewidth, low power consumption, high modulation efficiency, small volume and easy integration, the vertical cavity surface emitting laser (VCSEL) makes it possible to develop the field of atomic optics in the direction of miniaturization and low power consumption. It is widely used in the development of atomic-level optical devices. [0005] In May 2014, Changchun Institute of Optics and Machinery developed 795nm and 89...

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