Triaxial planeness detection system and triaxial planeness detection method

Abstract

The invention relates to a triaxial planeness detection system and a triaxial planeness detection method. The system comprises four parts including a basic component, a triaxial sliding mechanism, a workpiece locating platform and a laser measurement component. The triaxial sliding mechanism comprises a cross-shaped sliding table and a vertical sliding table, and the cross-shaped sliding table drives a detected workpiece to move in a horizontal range and works in cooperation with a laser measurement instrument. A measurement mode in which the workpiece moves and the laser measurement instrument is stationary is used, thus, accuracy of a measurement result is improved, and a problem that the measurement is not accurate enough when the laser measurement instrument moves and even micro vibration can cause large deviation of the measurement result is solved. The laser measurement component comprises three groups of the laser measurement instruments of which laser emitting extension lines mutually form a 90-degree included angle. By coordinated cooperation of the triaxial sliding mechanism and the laser measurement instruments, the system provided by the invention can complete measurement of side face and upper surface planeness of the measured workpiece in one work procedure, and thus, measurement efficiency is improved.

Description

technical field [0001] The invention relates to a flatness detection system, in particular to a three-axis flatness detection system and a detection method thereof. Background technique [0002] The flatness error is to compare the measured actual surface with the ideal plane, and the line value distance between the two is the flatness error value; or by measuring the relative height difference of several points on the actual surface, and then converting it to the line value Flatness error value. The more common flatness measurement methods usually include metering method and laser method. The metering method is to place the measured part and the micrometer on the standard flat plate, use the standard flat plate as the measurement reference surface, and use the micrometer along the The actual surface is measured point by point or along several straight lines. The laser method uses laser ranging to perceive the distance of each point, and then judges its flatness. [0003]...

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Problems solved by technology

[0004] In the prior art, the laser method only has one axis. Based on this axis, only one surface can be measured at a time. When the workpiece is cubic and all sides need to meet the predetermined flatness, the disadvantages of this detection system will appear. After measuring a surface, it is necessary to manually take out the workpiece, and then change the surface to reposition and continue the measurement, which undoubtedly reduces the overall measurement efficiency; at the same time, the existing technology uses a laser measuring instrument to move while the workpiece is fixed. The method relies on the laser measuring instrument to continuously move to measure the height difference on the surface of the workpiece. When the laser measuring instrument moves, because the laser is shot from the laser source to the workpiece, the tiny vibration will be amplified, which will greatly affect the measurement results. deviation

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