Piezoelectric regulating and controlling device and method for movement precision of closed hydrostatic guideway

Abstract

The invention discloses a piezoelectric regulating and controlling device for the movement precision of a closed hydrostatic guideway. The piezoelectric regulating and controlling device comprises a device fixing support fixedly connected to a base of the hydrostatic guideway; a piezoelectric regulating and controlling assembly is arranged between the top of the device fixing support and the baseof the hydrostatic guideway; the piezoelectric regulating and controlling assembly is composed of a fixed pre-tightening assembly, a piezoelectric crystal assembly and a tail end connecting assembly from top to bottom; the piezoelectric crystal assembly is connected with a driver; a guideway pressing plate is arranged at the bottom of the piezoelectric regulating and controlling assembly; a guideway sliding block is arranged at the bottom of the guideway pressing plate and located on the base of the hydrostatic guideway; a sensor support is further arranged on the base of the hydrostatic guideway; and a distance sensor is arranged on the sensor support and monitors the position information of the guideway sliding block in real time. The invention further discloses a piezoelectric regulating and controlling method of the piezoelectric regulating and controlling device for the movement precision of the closed hydrostatic guideway, and the problem that in the prior art, the deformation ofa guideway profiled surface affects the movement linear precision when a hydrostatic guideway works is solved.

Description

technical field [0001] The invention belongs to the technical field of precision control devices, and in particular relates to a piezoelectric control device for the motion precision of a closed static pressure guide rail, and also relates to a piezoelectric control method for the piezoelectric control device for the motion precision of a closed static pressure guide rail. Background technique [0002] With the development of the aerospace field, the requirements for the precision of large-aperture (diameter greater than 300mm) optical components are also increasing. Optical components are the main processing objects of precision grinding machines. Generally, the required surface accuracy is 15-30nm and the surface roughness is 0.3-0.6nm. Therefore, higher requirements are placed on the machining accuracy of the grinding machine. Hydrostatic guide rail is one of the important applications of sliding bearings. It has the advantages of low friction coefficient, long life, lar...

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to provide a piezoelectric control device for the motion accuracy of a closed static pressure guide rail, which solves the problem in the prior art that the deformation of the guide rail shape and surface affects the linear motion accuracy of the static pressure guide rail during operation.

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