A Controllable Depth Surface Defect Machining Method Based on Ultrasonic AFM Closed-loop System

Abstract

The present invention finally realizes precise processing of surface defects of nanometer materials at different depths by obtaining the information of processing depth and phase value. The invention relates to a controllable-depth surface defect processing method based on an ultrasonic AFM closed-loop system. The method includes establishing a function model of ultrasonic processing phase and applied mechanical force signal, substituting relevant processing parameters to obtain the range of Z-direction initial value of mechanical force signal; obtaining the actual phase difference-mechanical force curve and the optimal Z-direction initial value in open-loop mode; Combining the AFM processing results to obtain the phase value of different processing depths of nanomaterials; combining the optimal Z-direction initial value and the phase value of the predetermined depth to realize the closed-loop processing of setting the processing depth. Through this method of the present invention, the optimized open-loop processing is realized, and the closed-loop feedback is performed according to the relationship between the depth and phase of the processed material, and finally the precise processing of surface defects at different depths of nanomaterials is realized, which overcomes the inability of traditional AFM to accurately control the processing depth Shortcomings.

Description

technical field [0001] The invention relates to a depth-controllable surface defect processing technology of nanomaterials, in particular to a depth-controllable defect processing method on the surface of nanomaterials based on ultrasonic phase feedback atomic force microscope (AFM) technology. It is mainly used in various fields such as materials, electronic devices, and nanoscale processing. [0002] technical background [0003] With the discovery of graphene for the first time in 2004, a series of nanomaterials represented by graphene, such as transition metal sulfides, black phosphorus and other two-dimensional nanomaterials, began a research boom. At the same time, researchers are gradually conducting in-depth research on the basic properties of nanomaterials, especially how to use or change the properties of these nanomaterials through external means, so as to realize their potential applications in various fields such as optoelectronics, catalysis, and biology. . Re...

AI Technical Summary

Problems solved by technology

[0005] There are many problems in the traditional AFM processing technology. For example, due to the inability to accurately control the processing of the AFM probe on the surface of the material, over-processing or under-processing often occurs, which leads to severe wear of the needle tip or repeated processing, which greatly affects the processing. result

Images