Evaluation method of binary grating projection defocus degree based on image difference and lm iteration
An image difference and binary grating technology, applied in the direction of optical devices, instruments, measuring devices, etc., can solve the problems that are not conducive to the development of high-precision photomechanics, the pattern is not a sinusoidal curve, and affect the accuracy of measurement, etc., to achieve intuitiveness Strong, high accuracy, satisfying the effect of real-time calculation
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[0039] Such as figure 1 As shown, a binary grating projection defocus evaluation method based on image difference and LM (Levenberg-Marquardt) iteration, the method experimental device includes the following equipment: an industrial camera 1, high-resolution lens 2, optical platform 4 , an electronic computer 6, a projector 5, a plane calibration plate with low reflectivity and a clamping device 3 thereof. The industrial camera used in the test experiment has a pixel of 4 million pixels and a lens focal length of 35mm. Such as figure 2 As shown, the evaluation method includes the following steps:
[0040] Step 1. Fixing of the experimental device: Fix the calibration board, camera and projector tightly on the optical platform to limit the relative displacement between each part; during this process, the camera lens should be perpendicular to the plane of the calibration board, and the projection Position the instrument lens in the direction of the largest plane of the cali...
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