Three-degree-of-freedom decoupling ultra-precise large-stroke positioning and vibration excitation device
A vibration excitation device and ultra-precise technology, applied in the direction of measuring device, vibration test, fluid using vibration, etc., can solve the problems of limited motion accuracy, difficulty in achieving low frequency, large size of three-degree-of-freedom positioning platform, etc., to avoid displacement loss , reduce the difficulty of control, and ensure the effect of input displacement amplitude
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[0039] Such as Figure 1-6 As shown, it is a structural schematic diagram of a three-degree-of-freedom decoupling ultra-precision large-stroke positioning and vibration device provided by the present invention, which includes an upper load plate 1 and a lower mounting plate 5, and the connection between the upper load plate 1 and the lower mounting plate 5 They are connected through the middle magnetic levitation load part 3 and three identical actuating elements 2 around them.
[0040] Such as figure 2 As shown, the actuating element 2 includes a driver housing 204 with a ring-shaped partition. The driver housing 204 is provided with a giant magnetostrictive rod 207 wrapped with an excitation coil 205. The two ends of the giant magnetostrictive rod 207 pass through the yoke end. The cover 208 is connected and fixed with the driver housing 204, and the driver housing 204 is provided with a two-stage compliant lever amplifying mechanism 202, and the middle part of the second-...
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