Spatial nanopositioning and detection device and method for evaluating microscopic vision measurement performance

Abstract

This application discloses a space nano-positioning and detection device and method for evaluating the performance of microscopic vision measurement, including a space nano-positioning platform, a displacement sensor and a controller; wherein, the trajectory tracking accuracy of the space nano-positioning platform is better than 10 nanometers, and the displacement The measurement accuracy of the sensor is better than 2 nanometers, both of which are better than trajectory tracking and better than the measurement accuracy of the microscopic vision measurement system to be evaluated; the space nano-positioning platform carries the microscopic vision observation object, and performs positioning with specific trajectory and precision. Meet the needs of microscopic vision measurement; the displacement sensor detects the displacement of the nano-positioning platform; the controller realizes the multi-degree-of-freedom nano-motion in space, and evaluates the performance of microscopic vision measurement in real time; this application implements a microscopic vision measurement system The utility model and method are small in size, all-round, multi-angle, high-precision and automatic.

Description

technical field [0001] The invention relates to the field of precision and ultra-precision measurement, in particular to a space nano-positioning and detection device and method for evaluating the performance of microscopic vision measurement. Background technique [0002] As a new type of precision and ultra-precision non-contact measurement technology, micro vision has been widely used in opto-mechanical systems, advanced manufacturing, and biomedical fields. Many universities and R&D institutions at home and abroad have developed different microscopic vision measurement systems to achieve micron / submicron level precision measurement. [0003] The performance index of the microscopic vision measurement system, including field of view size, resolution, static detection accuracy, dynamic detection accuracy, bandwidth, measurement stability, etc. At this stage, there is still a lack of a complete set of dedicated hardware devices and methods for secondary detection, evaluati...

AI Technical Summary

Problems solved by technology

[0004] In the existing disclosed technology, only the static measurement accuracy of the microscopic vision measurement system can be evaluated, and the evaluation index is relatively single, which fails to fully reflect the real performance of the system, such as the dynamic measurement accuracy index under different speeds and bandwidths; The measurement accuracy of the microscopic visual measurement system is evaluated at the micron scale, and the evaluation at the nanoscale has not yet been realized; the degree of automation is low, most rely on manual sampling, a few can realize automatic sampling and post-processing, and there is no fully automatic systematic evaluation method; no obvious method has been proposed. The measurement stability evaluation method of the micro-vision measurement system lacks a quantitative evaluation of the measurement reliability. Most importantly, the existing measurement technology has low precision and cannot perform high-precision testing.

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