Beam expanding device for plane wave off-axis interferometer

Abstract

The invention provides a beam expanding device for a plane wave off-axis interferometer. The interferometer is arranged on an interferometer platform through a limiting mechanism. The beam expanding device comprises a supporting device, a primary mirror mechanism and a secondary mirror mechanism, wherein the primary mirror mechanism is arranged in the supporting device and is detachably connectedwith the supporting device; and the secondary mirror mechanism is arranged in the supporting device. According to the beam expanding device for the plane wave off-axis interferometer, generated large-aperture plane waves are free of aberration and blocking.

Description

technical field [0001] The invention belongs to the technical field of non-contact optical detection, in particular to a plane wave off-axis interferometer beam expander. Background technique [0002] Interferometer detection method is one of the most important methods to detect optical components and optical systems. The use of spherical wave interferometer for detection needs to be equipped with corresponding standard spherical mirrors or lens groups for assistance, which not only prolongs the processing cycle, but also greatly increases the processing cost. The increase in optical components during detection also increases the difficulty of assembly and adjustment. Therefore, It is more convenient to use a plane wave interferometer than a spherical wave for detection, especially the interferometer produced by the American 4D Technology Company, which can be applied to the on-site inspection of optical systems, easy to carry and transport, and can be used for optical inspe...

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Problems solved by technology

The use of spherical wave interferometer for detection needs to be equipped with corresponding standard spherical mirrors or lens groups for assistance, which not only prolongs the processing cycle, but also greatly increases the processing cost. The increase in optical components during detection also increases the difficulty of assembly and adjustment. Therefore, It is more convenient to use a plane wave interferometer than a spherical wave for detection, especially the interferometer produced by the American 4D Technology Company, which can be applied to the on-site inspection of optical systems, easy to carry and transport, and can be used for optical inspection in complex or harsh environments. However, the current American 4D Technology The maximum aperture of the interferometer produced by the company is only 100mm. With the increase in the demand for large-aperture optical systems, the 100mm aperture can no longer meet the requirements of production and processing, and the large-aperture optical transmission materials are difficult to obtain and the material uniformity is difficult. Defects such as guarantee and difficulty in processing

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