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Method and device for performing parylene coating on workpieces

A coating device and Parylene technology, applied in the field of thin film preparation technology, can solve problems such as affecting product effect and uneven thickness of Parylene coating, and achieve the effects of short coating time, improved work efficiency, and high coating uniformity.

Active Publication Date: 2019-05-21
SHENZHEN AOLAN TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

During the actual operation, it was found that the thickness of the parylene coating on the workpiece inside the cavity and near the vent is relatively thick, which leads to uneven thickness of the parylene coating on the workpiece in the cavity, which affects the effect of the product

Method used

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  • Method and device for performing parylene coating on workpieces
  • Method and device for performing parylene coating on workpieces
  • Method and device for performing parylene coating on workpieces

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Embodiment Construction

[0029] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the relevant drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. Rather, these embodiments are provided so that the understanding of the present disclosure will be better and more complete.

[0030] It should be noted that when an element is referred to as being “fixed” to another element, it can be directly on the other element or there can also be an intervening element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or intervening elements may also be present. In contrast, when an element is referred to as being "directly on" another element, there are no intervening elements present. The t...

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Abstract

The invention relates to a method for performing parylene coating on workpieces. The method comprises the following steps that the workpieces are statically placed in a box, and the workpieces are uniformly arranged in the box; gas containing pyraline for coating is fed into the box, and the gas is discharged from an exhaust port of the box after entering from a gas inlet of the box; and when thegas is fed into the box, the temperature in the box is controlled so that the temperature decreases sequentially from the gas inlet to the exhaust port. The advantages of high coating uniformity and high work efficiency are achieved.

Description

technical field [0001] The invention relates to the technical field of thin film preparation technology, in particular to a method and device for performing parylene coating on a workpiece. Background technique [0002] In order to prevent problems such as oxidation and solvent corrosion on the surface of the object, surface protection treatment is generally carried out on the surface of the object. Traditionally used protective coatings such as epoxy resin, polyvinyl chloride resin, silicone resin, and polyacrylate resin are all liquid coatings. Due to the viscosity and surface tension of the liquid, the thickness of the coating is uneven, and the coating is thinner at edges and corners. When there is only a small distance between objects and substrates, the coating will not flow. Air gaps are formed. After the coating is cured, shrinkage stress or tiny pinholes will be formed due to the volatilization of solvents or small molecule additives after drying. The dielectric ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B05D1/00B05C9/02C08G61/02C09D165/00C09D5/08C09D5/25
Inventor 云洋
Owner SHENZHEN AOLAN TECH CO LTD
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