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Low-temperature-drift mixed surface plasmon accelerometer

A surface plasmon and accelerometer technology, applied in the direction of acceleration measurement, optical components, optics, etc. using inertial force, it can solve the problems of large bending loss and drift of resonance characteristics, so as to suppress polarization noise and achieve zero temperature drift. , the effect of suppressing temperature fluctuation

Active Publication Date: 2019-04-16
SOUTHEAST UNIV
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Problems solved by technology

[0006] Purpose of the invention: Aiming at the existing problems that the resonant characteristics of the surface plasmon waveguide resonator drift with the change of the external temperature, and the bending loss is too large, the present invention proposes a hybrid surface plasmon accelerometer with low temperature drift

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Embodiment Construction

[0019] The technical solution of the present invention will be further described below in conjunction with the accompanying drawings.

[0020] Such as figure 1 , a low-temperature drift hybrid surface plasmon accelerometer of the present invention includes a tunable plasmon directional coupler 2 , a flexible surface plasmon waveguide 3 and an acceleration mass 9 .

[0021] Such as figure 2 , the tunable surface plasmon directional coupler 2 is a planar waveguide, and its waveguide cross-section from bottom to top is a first substrate 21, a first lower cladding layer 22, a first core layer 23, and a first upper cladding layer 24, Among them, the first core layer 23 is a strip-shaped, rectangular, ridge-shaped or inverted ridge-shaped structure, and is made of high-conductivity metal materials such as gold, silver, copper or aluminum, with a thickness between 6 nanometers and 50 nanometers and a width of between 2 microns and 20 microns; both the first lower cladding layer 21...

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Abstract

The invention discloses a low-temperature-drift mixed surface plasmon accelerometer. The low-temperature-drift mixed surface plasmon accelerometer comprises a tunable plasmon directional coupler, a flexible surface plasmon waveguide and an acceleration mass block located on the surface of the flexible surface plasmon waveguide; and the tunable plasmon directional coupler comprises an upper supportplasmon waveguide, a lower support plasmon waveguide and a modulation electrode, wherein the lower support plasmon waveguide is used for inputting and outputting optical signals, the modulation electrode is arranged on the lower support plasmon waveguide, the two ends of the upper support plasmon waveguide are connected with the two ends of the curved flexible surface plasmon waveguide so as to form a surface plasmon waveguide annular resonant cavity, and an annular resonant ring is perpendicular to the plane where the tunable plasmon directional coupler is located. The temperature fluctuation of the resonant frequency of a resonant cavity can be effectively inhibited by utilizing opposite thermo-optical characteristics of the silicon dioxide-based tunable surface plasmon directional coupler and the flexible surface plasmon waveguide, and the zero-temperature drift of the resonance frequency is expected to be realized under the optimal matching condition.

Description

technical field [0001] The invention relates to a mixed surface plasmon accelerometer with low temperature drift, and belongs to the technical fields of integrated optical sensing and optical accelerometers. Background technique [0002] The accelerometer uses the accelerometer's sensitive characteristics to test the motion acceleration of the carrier. As a very important type of inertial sensor, it is an important part of the new generation of inertial sensing system. It plays a very important role in the fields of navigation, guidance and control detection, and has been widely used in many directions, such as: navigation, earthquake Detection, aviation, aerospace, precision guidance and control, etc. There are many types of accelerometers in practical applications, such as: electromagnetic accelerometers, pendulum accelerometers, micro-electromechanical accelerometers, flexible accelerometers, optical accelerometers, etc. Among them, optical accelerometers are further di...

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01P15/03G02B5/00
CPCG01P15/03G02B5/008
Inventor 张彤陆士明张晓阳刘怡然唐杰
Owner SOUTHEAST UNIV
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