Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement

An absolute angle, dual light source technology, applied in the fields of precision measurement and optical engineering, to reduce the impact, improve the measurement accuracy, and improve the anti-interference ability.

Active Publication Date: 2019-04-16
HARBIN INST OF TECH
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Problems solved by technology

[0010] Aiming at the two problems existing in the traditional autocollimator, the present invention discloses a dual light source high-precision anti-interference and large working distance autocollimation device and method based on absolute angle measurement. Compared with the traditional autocollimator, it can Measure under more complex air environment conditions, improve the measurement accuracy, anti-interference ability and stability of the laser autocollimator during the measurement process; at the same time, the device uses the horizontal liquid level as the reference to realize the alignment between the autocollimation device and the measured target The absolute angle measurement of

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  • Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement
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  • Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement

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specific Embodiment 1

[0044] This embodiment is the first specific embodiment of a dual-light source high-precision anti-interference and large working distance autocollimation device based on absolute angle measurement.

[0045] The dual-light source high-precision anti-interference and large working distance self-collimation device based on absolute angle measurement in this embodiment, the structural diagram is as follows figure 2 shown.

[0046] The self-collimation device includes a light source unit 1, a first polarizer 6, a feedback imaging unit 4, a first transmissive collimator mirror 2, a combined mirror 5, a second polarizing beam splitter 7, and an angular drift feedback measurement unit 8 , and a wavefront distortion feedback measurement unit 9 .

[0047] The device includes a first light source 11 , a second light source 12 , a second dichroic mirror 14 , and a third dichroic mirror 55 . The first light source 11 and the second light source 12 respectively emit beams of different w...

specific Embodiment 2

[0072] This embodiment is the second specific embodiment of a dual-light source high-precision anti-interference and large working distance autocollimation device based on absolute angle measurement.

[0073] The dual-light source high-precision anti-interference and large working distance self-collimation device based on absolute angle measurement in this embodiment, the structural diagram is as follows Figure 4 shown. On the basis of the specific embodiment 1, the second transmissive collimator 82 , the fourth feedback beam splitter 92 , and the angle adjustment unit 93 are removed, and the third transmissive collimator 94 is added. The optical path structure of the disturbance feedback measurement unit is adjusted, the volume of the optical path and optical components is reduced, the overall structure is compact and stable, and it has more advantages of portability design. At the same time, the software algorithm replaces the mechanical adjustment and alignment link, impr...

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Abstract

The invention belongs to the precision measurement technology field and the optical engineering field and especially relates to a dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement. The device comprises a light source unit, a first polarizing film, a feedback imaging unit, a first transmission-type collimating mirror, a combined reflecting mirror, a second polarizing beam splitter, an angular drift amount feedback measuring unit and a wavefront distortion feedback measuring unit. Through increasing the angular drift amount feedback measuring unit and the wavefront distortion feedback measuring unit, a angular drift and wavefront distortion introduced when a self-collimating beam is disturbed by air are measured and compensated in real time, and the influence of air disturbance on the self-collimating beam in a complex air environment and a long working distance is reduced, and measurement andcompensation precision is increased. A dual-light-source structure form is used to reduce the interference of the other light source and external environment stray light on sensor detection, improve asignal-to-noise ratio, and increase the anti-interference ability and the stability of a laser autocollimator. In addition, a horizontal reference measurement optical path is added so that the absolute yaw angles and the angles of pitch of the laser autocollimator and a measured surface relative to a horizontal reference can be measured.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a dual light source high-precision anti-interference large working distance self-collimation device and method based on absolute angle measurement. Background technique [0002] With the continuous improvement of the level of science and technology, processing and manufacturing presents a trend of high precision and large size, in which precise small-angle measurement is an important part. The instrument commonly used for precise small-angle measurement is a laser autocollimator with the principle of optical self-collimation as the core. important role. [0003] Laser autocollimator has the advantages of high resolution, high precision, long measurement distance, fast measurement speed, non-contact, convenient adjustment and movement, etc., and has a very wide range of applications in the above fields. [0004] In precision an...

Claims

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Application Information

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IPC IPC(8): G01C1/00
CPCG01C1/00G01B11/26
Inventor 朱凡于洋石剑谭久彬
Owner HARBIN INST OF TECH
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