Dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement

Abstract

The invention belongs to the precision measurement technology field and the optical engineering field and especially relates to a dual-light-source high-precision anti-interference large-working-distance self-collimating device and method based on absolute angle measurement. The device comprises a light source unit, a first polarizing film, a feedback imaging unit, a first transmission-type collimating mirror, a combined reflecting mirror, a second polarizing beam splitter, an angular drift amount feedback measuring unit and a wavefront distortion feedback measuring unit. Through increasing the angular drift amount feedback measuring unit and the wavefront distortion feedback measuring unit, a angular drift and wavefront distortion introduced when a self-collimating beam is disturbed by air are measured and compensated in real time, and the influence of air disturbance on the self-collimating beam in a complex air environment and a long working distance is reduced, and measurement andcompensation precision is increased. A dual-light-source structure form is used to reduce the interference of the other light source and external environment stray light on sensor detection, improve asignal-to-noise ratio, and increase the anti-interference ability and the stability of a laser autocollimator. In addition, a horizontal reference measurement optical path is added so that the absolute yaw angles and the angles of pitch of the laser autocollimator and a measured surface relative to a horizontal reference can be measured.

Description

technical field [0001] The invention belongs to the field of precision measurement technology and the field of optical engineering, in particular to a dual light source high-precision anti-interference large working distance self-collimation device and method based on absolute angle measurement. Background technique [0002] With the continuous improvement of the level of science and technology, processing and manufacturing presents a trend of high precision and large size, in which precise small-angle measurement is an important part. The instrument commonly used for precise small-angle measurement is a laser autocollimator with the principle of optical self-collimation as the core. important role. [0003] Laser autocollimator has the advantages of high resolution, high precision, long measurement distance, fast measurement speed, non-contact, convenient adjustment and movement, etc., and has a very wide range of applications in the above fields. [0004] In precision an...

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Problems solved by technology

[0010] Aiming at the two problems existing in the traditional autocollimator, the present invention discloses a dual light source high-precision anti-interference and large working distance autocollimation device and method based on absolute angle measurement. Compared with the traditional autocollimator, it can Measure under more complex air environment conditions, improve the measurement accuracy, anti-interference ability and stability of the laser autocollimator during the measurement process; at the same time, the device uses the horizontal liquid level as the reference to realize the alignment between the autocollimation device and the measured target The absolute angle measurement of

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