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A quartz crucible bubble layered counting device and method

A quartz crucible and counting device technology, which is applied in the field of quartz crucible bubble layer counting devices, can solve problems such as error-prone, time-consuming, and accuracy of test results.

Active Publication Date: 2019-04-05
赵谦
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, people mainly check and judge the detection results manually, but people are easily affected by various factors such as subjective quality, personal emotion, vision, etc.
Manual detection is not only time-consuming, but also prone to errors, which has a great impact on the accuracy of test results

Method used

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  • A quartz crucible bubble layered counting device and method
  • A quartz crucible bubble layered counting device and method
  • A quartz crucible bubble layered counting device and method

Examples

Experimental program
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Embodiment Construction

[0076] like figure 1 A kind of quartz crucible bubble stratification counting device shown, comprises data processing controller 1, micro-projector and the image acquisition device connected with data processing controller 1, and described image acquisition device comprises mechanical arm 2 and is clamped on The electronic magnifying glass 3 on the mechanical arm 2, the electronic magnifying glass 3 and the mechanical arm 2 are connected to the data processing controller 1, and the light projected by the micro projector is blue-violet light.

[0077] In this embodiment, the data processing controller 1 is a computer.

[0078] In this embodiment, the mechanical arm 2 is a six-degree-of-freedom mechanical arm, the magnification range of the electronic magnifying glass 3 is 1 to 500 times, and the electronic magnifying glass 3 communicates with the data processing controller 1 through a USB transmission line. Next, the mechanical arm 2 is controlled by the data processing contro...

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PUM

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Abstract

The invention discloses a quartz crucible bubble layered counting device and method, the device comprises a data processing controller, a miniature projector and an image acquisition device, the imageacquisition device comprises a mechanical arm and an electronic magnifying lens, and the light projected by the miniature projector is blue-violet light; The method comprises the following steps: 1,collecting and transmitting a quartz crucible image; 2, denoising and balancing the amplified image of the quartz crucible; 3, layering bubble images of the quartz crucible; And 4, acquiring the bubble contour of the bubble layering image of the quartz crucible. The device is reasonable in design, the bubble image of the transparent layer in the quartz crucible is obtained through the electronic magnifying lens, and the bubble image is subjected to layering processing, so that whether the quartz crucible production process reaches the standard or not is judged, manpower, material resources andfinancial resources are saved, and the automation degree of quartz crucible inspection is improved.

Description

technical field [0001] The invention belongs to the technical field of bubble detection in a quartz crucible, and in particular relates to a layered counting device and method for bubbles in a quartz crucible. Background technique [0002] Quartz crucibles are widely used in many important fields, especially in single crystal silicon for manufacturing semiconductor electronic components, quartz crucibles are the main equipment, and the bubbles in the transparent layer of quartz crucibles greatly affect the crystal pulling results, so It is extremely important to select an experimental quartz crucible with a small number of bubbles. The cross-section of the quartz crucible usually has a double-layer structure: the inner layer is colorless, called the transparent layer, characterized by transparency, less bubble content, spherical and evenly distributed bubbles; the outer layer is white, called the opaque layer, characterized by It is opaque and contains a lot of bubbles, and...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G06T7/13G06T7/136
CPCG06T7/13G06T7/136
Inventor 赵谦史凌云李蓉蓉李小龙唐振华
Owner 赵谦
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