A preparation method of an uncooled infrared detector based on a piezoelectric resonator

Abstract

A preparation method of an uncooled infrared detector based on a piezoelectric resonator relates to the field of infrared detection technology, and solves the problem of low absorption rate of the infrared detector obtained by the preparation method, including preparing a piezoelectric resonator; Prepare metal reflection layer, medium layer and metal array layer; prepare readout integrated circuit substrate; connect readout integrated circuit substrate and piezoelectric resonator. The preparation method of the present invention has the advantages of integrated manufacturing, mass production, and low cost; by integrating a metal reflective layer, a dielectric layer, and a metal array layer on the surface of the piezoelectric resonator, the metal array layer is used to realize enhanced absorption of infrared spectrum and energy absorption Acting on the piezoelectric resonator, the absorption rate is increased to more than 80%, and the selectivity of the uncooled infrared detector to the incident spectrum is increased at the same time. The uncooled infrared detector prepared by the method not only has the advantages of traditional uncooled infrared detection, but also has fast response and high detection sensitivity.

Description

technical field [0001] The invention relates to the technical field of infrared detection, in particular to a method for preparing an uncooled infrared detector based on a piezoelectric resonator. Background technique [0002] Uncooled infrared detectors are also called room temperature detectors, which can work at room temperature. Uncooled infrared detectors are generally thermal detectors, that is, they work by detecting the thermal effect of infrared radiation. Uncooled infrared detectors have the advantages of small size, light weight, long life, low cost, and low power consumption. Therefore, uncooled infrared detectors are more and more widely used in military, security, medical detection and other fields. [0003] In recent years, with the development of micro-nano sensing technology, the application of piezoelectric resonators has also been extended to the field of uncooled infrared detectors. On the one hand, piezoelectric resonators usually have a miniature size...

AI Technical Summary

Problems solved by technology

[0004] However, in the existing preparation methods of uncooled infrared detectors based on piezoelectric resonators, the prepared detectors have a low absorption rate of infrared radiation and have no selectivity to the incident spectrum.

Images