Polarized infrared sensor based on metasurface fbar resonant frequency temperature drift characteristics
An infrared sensor and resonant frequency technology, applied in the field of infrared sensing, can solve the problems of low spatial resolution, low energy utilization rate, large volume and weight, etc., and achieve the effects of small size, optimized structure and performance, and low cost
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[0035] In order to understand the above-mentioned purpose, features and advantages of the present invention more clearly, the present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0036] In the following description, many specific details are set forth in order to fully understand the present invention. However, the present invention can also be implemented in other ways different from those described here. Therefore, the protection scope of the present invention is not limited by the specific details disclosed below. EXAMPLE LIMITATIONS.
[0037] A polarized infrared sensor based on the temperature drift characteristics of the resonant frequency of the metasurface FBAR, such as figure 1 As shown, the infrared sensor also includes a readout integrated circuit substrate 1 (also known as ROIC substrate), a thin film bulk acoustic resonator 2, a metal reflection layer 3-3, a dielectric layer 3-2 and a...
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