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Transient voltage suppressor and method of making the same

A technology of transient voltage suppression and manufacturing method, which is applied in semiconductor/solid-state device manufacturing, circuits, electrical components, etc., can solve the problems of high production cost and long production cycle, achieve fewer times, reduce application cost, and improve cell efficiency. area effect

Active Publication Date: 2021-11-30
UNIV OF ELECTRONICS SCI & TECH OF CHINA ZHONGSHAN INST
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] At present, in the production process of conventional transient voltage suppressors, at least four photolithography operations are required to complete, and the production cost is high and the production cycle is long.

Method used

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  • Transient voltage suppressor and method of making the same
  • Transient voltage suppressor and method of making the same
  • Transient voltage suppressor and method of making the same

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Embodiment Construction

[0028] The invention mainly provides a solution to the problems of high production cost and long production cycle in the production process of conventional transient voltage suppressors.

[0029] In order to make the objectives, technical solutions and beneficial technical effects of the present invention clearer, the technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the drawings in the embodiments of the present invention. Obviously, the described implementation Examples are only some embodiments of the present invention, not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0030] In the description of the present invention, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "hor...

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Abstract

The invention discloses a transient voltage suppressor and a manufacturing method thereof. In the manufacturing method, a substrate of a first conductivity type is etched and a forward groove located in the substrate is formed; in the forward groove filling the dielectric layer; etching the substrate from the side surface of the substrate and forming a lateral trench extending to the dielectric layer in the substrate; growing a second conductive layer in the lateral trench type of epitaxial layer; the upper surface and the lower surface of the substrate are respectively covered with a first metal layer and a second metal layer, thereby forming a transient voltage suppressor. The transient voltage suppressor prepared by the manufacturing method of the present invention has a bidirectional protection function, and the manufacturing of the transient voltage suppressor by using the method not only has low cost, but also has a short manufacturing cycle.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a transient voltage suppressor and a manufacturing method thereof. Background technique [0002] Electro-Static Discharge (ESD) and other random transient voltages in the form of voltage surges usually exist in various electronic devices. Voltage surges ranging from electrostatic discharge to lightning can induce transient current spikes. As semiconductor devices are increasingly miniaturized, high-density, and multi-functional, electronic devices are increasingly vulnerable to voltage surges, which can even cause fatal injuries. [0003] A transient voltage suppressor (TransientVoltage Suppressor, TVS), as a diode-based protection device, is usually used to protect sensitive circuits from various forms of transient high voltage impacts. Based on different applications, the transient voltage suppressor can protect the circuit by changing the surge discharge path and its ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/329H01L29/861H01L29/06
CPCH01L29/0657H01L29/66136H01L29/8613H01L29/8618
Inventor 于广程羽佳其他发明人请求不公开姓名
Owner UNIV OF ELECTRONICS SCI & TECH OF CHINA ZHONGSHAN INST
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