Method for testing elasticity modulus of nano thin film on flexible substrate

Abstract

The invention relates to a method for testing elasticity modulus of a nano thin film on a flexible substrate, and belongs to the technical field of mechanical property testing of the nano thin films.According to the method, on the basis that a traditional stepping motor is combined with a ball screw in a loading mode, an upper baffle piece, a lower baffle piece and a sliding block are designed, wherein the position relation among the upper baffle piece, the lower baffle piece, the sliding block and the flexible substrate is adjustable, so that it is ensured that the pre-stretched flexible isnot affected by the contact of other components, a coating area on the surface of the substrate is controlled, and the surfaces of an upper part and a lower part of the substrate can be coated symmetrically under a pre-stretching condition; in addition, the requirement for synchronous testing of the deformation of a coating-free part and a coating part of the flexible substrate in the compressionprocess is met. In addition, the combination of the pre-stretching technology and a strain difference method is achieved for the first time, the problem of easy buckling of the thin film in compression is solved, and the elasticity modulus of the nano thin film on the flexible substrate is obtained.

Description

technical field [0001] The invention relates to a method for testing the elastic modulus of a nano film on a flexible substrate, belonging to the technical field of testing the mechanical properties of a nano film. Background technique [0002] The rapid development of microelectromechanical systems (MEMS) and flexible electronics has promoted the development and application of more and more new technologies, which have attracted widespread attention from academia and industry, such as microsensors, electronic skin, and bendable displays. As one of the basic structures, functional thin films (generally tens to hundreds of nanometers in thickness) are usually deposited on flexibly deformable polymer substrates. In actual use, these systems are subjected to complex mechanical loads, and their lifetime and performance strongly depend on the mechanical properties of the film. Therefore, it is very important to develop relevant testing techniques for the mechanical properties of...

AI Technical Summary

Problems solved by technology

[0005] Through literature research and analysis, it can be seen that although relevant technologies have been proposed in the study of the compression behavior of the film-substrate structure, the experimental testing methods for the elastic modulus of nano-films on flexible substrates based on compression experiments are very scarce, and the relevant research is not systematic enough.

Images