A full-displacement amplified piezoelectric inchworm linear stage

Abstract

The invention discloses a full-displacement amplified piezoelectric inchworm linear platform, wherein, the fixed platform is provided with a slideway; a mover is arranged in the slideway; the mover comprises a first frame body and a second frame body arranged along the slideway length direction gap; the first frame body is fixedly arranged on the movable table surface; the first frame body and thesecond frame body are respectively connected with a first driving unit and a second driving unit; A bridge portion is implicated between the first driving unit and the second driving unit; The fixedplatform is provided with a first clamping group clamped on the first frame body and a second clamping group clamped on the second frame body, wherein the first clamping group and the second clampinggroup are respectively telescopically arranged along the slideway width direction; By sequencing the first clamping group, the first driving unit, the second clamping group and the second driving unit, the mover and the movable table are inchworm-like traveled and positioned along the slideway. The invention has the advantages of compact structure, large movable table surface, low requirement formachining and assembling precision of the clamping unit and the driving mechanism, sufficient clamping and releasing, power-off clamping, fast moving speed and small moving error.

Description

technical field [0001] The invention belongs to the technical field of nano-positioning, relates to a large-stroke, high-resolution nano-positioning platform, in particular to a full-displacement amplified piezoelectric inchworm linear platform. Background technique [0002] Piezoelectric inchworm linear stage is a precision positioning platform with large stroke and high resolution. Based on the principle of inchworm crawling in bionics, it continuously accumulates the small displacement of the piezoelectric actuator to form a continuous large stroke displacement. Compared with the electromagnetic linear motor type platform, the piezoelectric inchworm linear platform has the advantages of small size, no heat generation, easy control, no end effect and thrust fluctuation; compared with ultrasonic resonance type, inertial drive type piezoelectric linear stage , has the advantages of large output force, high power density, stable positioning, and no friction and wear. Theref...

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Problems solved by technology

[0003] 1) The structure is not compact, the moving table is small, the clamping displacement or release displacement of the clamping unit is the output displacement of the piezoelectric actuator, and the output displacement of the piezoelectric actuator is very small. In order to make the clamping unit reliable Clamping and releasing require the clamping unit and drive unit to have very high processing and assembly precision;

[0004] 2) The output displacement of the clamping unit is small, which will make the clamping unit unable to fully clamp or release the mover, and the mover cannot be fully clamped, the clamping force it receives will be small, and the motion stability will be reduced ; If the mover cannot be fully released, severe friction and wear will occur, reducing the life of the platform;

[0005] 3) The platform cannot be self-locked (that is, it cannot be clamped by power failure), that is, when the platform is not working, the mover cannot be clamped by the clamp unit;

[0006] 4) The single-step displacement of the drive unit is the output displacement of the piezoelectric actuator, which is often very small, so that the movement speed of the platform is low;

[0007] 5) There is no special guide mechanism, and the fixed motion accuracy of the platform depends on the processing and assembly accuracy of the clamp unit and the drive unit. In order to make the platform have a small motion error, the processing and assembly accuracy of the clamp unit and the drive unit must be High, which makes the platform relatively difficult to achieve high motion accuracy

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