High-precision optical-mechanical accelerometer based on hemispherical micro-nano cavity mechanical-optical coupling

Abstract

The invention discloses a high-precision optical-mechanical accelerometer based on hemispherical micro-nano cavity mechanical-optical coupling. The high-precision optical-mechanical accelerometer comprises an upper planar cavity silicon microstructure, a middle hemispherical cavity silicon microstructure and a lower glass substrate with electrode leads. The upper structure is bonded on the middlestructure through the upper end of the annular fixed anchor points, and the middle structure is bonded on the lower structure through the lower end of the annular fixed anchor points. The upper structure comprises micro-nano optical fibers, a planar cavity, an upper antireflection coating layer, an upper mirror coating layer, an insulating layer, a feedback electrode and a spacing adjusting electrode. The middle structure comprises a hemispherical cavity mass, a lower antireflection coating layer, a lower hemispherical mirror coating layer, the annular fixed anchor points and multiple elasticcantilever beams. The lower structure comprises a feedback electrode, a spacing adjusting electrode, a signal lead and the glass substrate. The optical signal is used as the measuring signal of the micro accelerometer and the hemispherical optical micro-nano cavity is used so that the sensitivity is high and the dynamic range is large.

Description

technical field [0001] The invention belongs to the technical fields of micro-opto-electromechanical systems and micro-inertial measurement, and relates to an accelerometer, more specifically, to a high-precision accelerometer based on hemispherical micro-nano cavity mechanical-optical coupling that can be used for out-of-plane vertical axis acceleration sensitivity. Optomechanical accelerometer. Background technique [0002] Micro-opto-electro-mechanical system (MOEMS) is a very dynamic new technology system developed in micro-electro-mechanical system (MEMS) in recent years. It is a combination of micro-optics, micro-electronics and micro-mechanics. The new micro-optical structure system can give full play to the comprehensive performance of the three. Compared with conventional systems, micro-opto-electromechanical systems have significant advantages such as small size, light weight, compatibility with large-scale integrated circuit manufacturing processes, easy mass pro...

AI Technical Summary

Problems solved by technology

However, with the continuous improvement of the performance requirements of the micromachined accelerometer, for inertial navigation level high precision (10 -6 -10 -9 g) The demand for the micro-accelerometer is becoming more and more urgent, while the detection sensitivity of the MOEMS accelerometer in the prior art is low and cannot meet the demand

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