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Electrostatic-piezoelectric hybrid drive transceiver integrated cmut, its use method and preparation method

A hybrid drive, piezoelectric technology, applied in the direction of the fluid that utilizes vibration, can solve the problem of not being able to achieve high-performance ultrasonic transmission and reception at the same time, and achieve the effect of improving the receiving sensitivity, improving the vibration displacement of the film, and improving the transmitting and receiving sensitivity.

Active Publication Date: 2020-05-22
XI AN JIAOTONG UNIV
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  • Claims
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AI Technical Summary

Problems solved by technology

The same CMUT ultrasonic output sound pressure and receiving sensitivity are mutually restricted, and it is impossible to realize high-performance ultrasonic transmission and reception at the same time

Method used

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  • Electrostatic-piezoelectric hybrid drive transceiver integrated cmut, its use method and preparation method
  • Electrostatic-piezoelectric hybrid drive transceiver integrated cmut, its use method and preparation method
  • Electrostatic-piezoelectric hybrid drive transceiver integrated cmut, its use method and preparation method

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Embodiment Construction

[0047] Below, the present invention is described in detail in conjunction with accompanying drawing and embodiment:

[0048] like figure 1 As shown, the electrostatic-piezoelectric hybrid drive transceiver integrated CMUT of the present invention includes an upper electrode 1, a vibrating membrane 2, a cavity 3, a piezoelectric pillar 4, an insulating layer 5 and a lower electrode 6;

[0049] Among them, the piezoelectric pillar 4 is made of piezoelectric material, and the piezoelectric pillar 4 adopts PZT piezoelectric material, AlN piezoelectric material, PVDF piezoelectric material or ZnO piezoelectric material; and mainly uses its d 33 The piezoelectric coefficient, that is, the direction of the electric field in the area of ​​the piezoelectric pillar is consistent with the direction of the stretching vibration of the pillar. The purpose of using the piezoelectric pillar 4 is: under the action of positive and negative polarity voltage, it can produce telescopic deformatio...

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Abstract

The invention discloses a static electricity-piezoelectricity hybrid driven integrated transceiver CMUT and an application method and a preparation method thereof. A supporting column adopts piezoelectric materials, and expansion deformation and vibration can be generated under action of positive and negative polarity voltage. The CMUT sequentially comprises an upper electrode, a vibration film, apiezoelectric supporting column, an insulating layer and a lower electrode from top to bottom. The lower electrode and the upper electrode cover a whole cavity and the piezoelectric supporting columnarea. When the CMUT is used as an ultrasound transmitting transducer, positive polarity dc bias voltage is loaded, the piezoelectric supporting column stretches, the height of the cavity increases, the vibration film displacement space is increased, and output sound pressure is improved. After alternating voltage is superposed, the vibration film and the piezoelectric supporting column vibrate and emit ultrasonic waves. When the CMUT is used as an ultrasonic receiving transducer, negative polarity dc bias voltage is loaded, the piezoelectric supporting column retracts, the height of the cavity decreases, and capacitance variation and receiving sensitivity can be improved. When the ultrasonic waves are incident, the vibration film and the piezoelectric supporting column vibrate and generate detectable electrical signals to achieve ultrasonic wave receiving.

Description

technical field [0001] The invention relates to the technical field of MEMS ultrasonic transducers, in particular to an electrostatic-piezoelectric hybrid driving and transmitting-receiving integrated CMUT and a use method and a preparation method thereof. Background technique [0002] Micromachined Ultrasonic Transducer (MUT) based on MEMS technology has the characteristics of miniaturization, good impedance matching with fluid, batch preparation, easy two-dimensional array processing, and easy integration with ICs. Ultrasound imaging and therapy (Point of Care Diagnostics, POC), ultrasound biometric recognition, 3D ultrasound gesture recognition and non-contact control and other cutting-edge application fields have great application potential. Miniature ultrasonic transducers mainly include capacitive micromachined ultrasonic transducer (CMUT) and piezoelectric micromachined ultrasonic transducer (Piezoelectric Micromachined Ultrasonic Transducer, PMUT). Compared with CMU...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): B06B1/02B06B1/06
CPCB06B1/02B06B1/06
Inventor 李支康赵立波李杰赵一鹤罗国希徐廷中郭帅帅蒋庄德
Owner XI AN JIAOTONG UNIV
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