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A kind of surface acoustic wave device and its preparation method

A surface acoustic wave device, a technology of acoustic wave velocity, applied in electrical components, impedance networks, etc., can solve the problems of limited improvement of the quality factor of surface acoustic wave devices, inability to effectively reduce the number of spurious modes, etc. The effect of the quality factor

Active Publication Date: 2022-05-03
EPIC MEMS XIAMEN CO LTD
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] However, in the prior art, the number of spurious modes cannot be effectively reduced by the apodization method, so the effect on improving the quality factor of SAW devices is limited

Method used

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  • A kind of surface acoustic wave device and its preparation method
  • A kind of surface acoustic wave device and its preparation method
  • A kind of surface acoustic wave device and its preparation method

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Embodiment Construction

[0051] The core of the invention is to provide a surface acoustic wave device. In the prior art, the apodization method is usually selected to improve the quality factor of the surface acoustic wave device. The so-called apodization method means that the position of the opening between the two opposite electrodes in the interdigital transducer changes regularly between the two bus bars, such as figure 1 as shown, figure 1It is a top view of a surface acoustic wave device in the prior art. exist figure 1 In the figure, from left to right, the openings between the two opposing electrodes in the interdigital transducer are distributed from the middle to the bus bar, and then distributed from the position close to the bus bar to the middle. However, the position of the opening between the two opposing electrodes in the IDT has a significant impact on the waveform, and changing the position of the opening between the two electrodes along the direction of the generatrix correspon...

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Abstract

The invention discloses a surface acoustic wave device. The interdigital transducer busbars are divided into a gap area, an edge area and a middle area, and the direction from any busbar to two busbars is sequentially divided into a gap area and an edge area. and the middle area. By setting the hill layer covered by the electrode between the piezoelectric substrate and the electrode, the sound wave velocity in the gap region is greater than that in the middle region, and the sound wave velocity in the middle region is greater than that in the edge region. Through the above settings, the waveform transmitted between the interdigital transducers can be filtered into a piston waveform, thereby filtering the rest of the non-piston waveform, thereby effectively reducing the spurious mode of the surface acoustic wave device, so that the surface acoustic wave device has a higher quality factor. The present invention also provides a method for preparing a surface acoustic wave device, and the surface acoustic wave device prepared by the method also has the above beneficial effects.

Description

technical field [0001] The invention relates to the field of acoustic wave devices, in particular to a surface acoustic wave device and a preparation method thereof. Background technique [0002] With the continuous advancement of science and technology in recent years, surface acoustic wave devices have been greatly developed. The so-called surface acoustic wave is an elastic wave that is generated and propagated on the surface of a piezoelectric solid material, and whose amplitude decreases rapidly as the depth of the solid material increases. Compared with bulk acoustic waves propagating along the interior of solid media, surface acoustic waves have two remarkable features: one is high energy density, of which about 90% of the energy is concentrated in a thin surface layer with a thickness equal to one wavelength; the other is slow propagation speed , which is about 45% of the longitudinal wave velocity and 90% of the shear wave velocity. [0003] Based on the above-men...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/64H03H9/02H03H3/08
CPCH03H3/08H03H9/02574H03H9/64
Inventor 彭波华胡念楚贾斌
Owner EPIC MEMS XIAMEN CO LTD
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