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A novel flexible shear stress and pressure sensor structure and manufacturing method

A technology of a pressure sensor and a manufacturing method, which is applied in the direction of measuring fluid pressure, fluid pressure measurement through thermal devices, instruments, etc., can solve the problems of reducing measurement sensitivity and accuracy, and achieve high aspect ratio, fast response, and high sensitivity.

Active Publication Date: 2020-09-25
西安砺芯慧感科技有限公司
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Problems solved by technology

[0007] In the above methods, most hard substrates can only be measured on a plane due to their inflexibility, while flexible substrates have better adaptability to curved surfaces, but the sensitivity and accuracy of measurement are greatly reduced due to the small aspect ratio.

Method used

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  • A novel flexible shear stress and pressure sensor structure and manufacturing method
  • A novel flexible shear stress and pressure sensor structure and manufacturing method
  • A novel flexible shear stress and pressure sensor structure and manufacturing method

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Embodiment Construction

[0030] Refer to figure 1 , image 3 , Figure 4 The new type of flexible shear stress and pressure sensor in this embodiment has a silicon dioxide layer 2 on the PI flexible substrate 1, a cavity 4 in the middle of the silicon dioxide layer 2 with a width of 9 μm; the cavity 4 The upper middle position is the "sandwich" sensitive unit of the sensor. The sensitive unit is the heating unit 8, the silicon dioxide insulating layer 7 and the measuring unit 6 from top to bottom; the materials of the heating unit 8 and the measuring unit 6 in this embodiment They are gold and nickel. The sensitive unit is supported by 100 micron-sized simply supported beams 5 on the upper end of the cavity 4. The length, width and height of the simply supported beams 5 are 9 μm, 1 μm, and 1 μm, respectively. One of the two adjacent simply supported beams 5 The gap between them is 5μm; the two ends of the simply supported beam 5 are fixed on the sidewalls of the cavity 4; the bottom of the cavity 4 is ...

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Abstract

The present invention discloses a novel flexile shearing strength and pressure sensor structure and a manufacturing method thereof, belonging to the field of micro electro mechanical systems (MEMS). The novel flexile shearing strength and pressure sensor structure can measure the shearing strength and the pressure. A flexible substrate is employed and has advantages of flexion torsion and hook face adaptation. A flexible substrate is attached on a glass sheet, silicon dioxide is sprayed on the flexible substrate, and an etching resistance layer, a measurement line and a heating unit form a sensor having a nanometer cavity allowing a heating unit and a measurement unit to be separated. The sensor can measure the shearing strength and the pressure and can achieve installation and measurementof the physical parameters at one time; the sensor employs the flexible substrate and has the flexion torsion and hook face adaptation; and moreover, the sensor has a high length-width ratio, is highin sensitivity and fast in response speed.

Description

[0001] Technical Field: [0002] The invention relates to a novel flexible shear stress and pressure sensor structure and manufacturing method, belonging to the field of microelectromechanical systems (MEMS). Background technique: [0003] Shear stress and pressure are important measurement parameters in the field of experimental aerodynamics, but almost all existing technologies use different instruments to measure them separately, and they cannot be measured simultaneously at the same location. The temperature-sensitive wall shear stress microsensor can realize indirect measurement of wall shear stress. Among them, the wall shear stress microsensor based on MEMS technology has the characteristics of high sensitivity, low power consumption, and high time / space resolution. The wall shear stress micro sensor based on polyimide flexible substrate not only has all the advantages of the conventional substrate wall shear stress micro sensor, but the installation and measurement of the s...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01L11/00
CPCG01L11/002
Inventor 马炳和王朋彬孙宝云罗剑邓进军
Owner 西安砺芯慧感科技有限公司
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