A rotating stage and control method for multi-station precision operation

Abstract

The present invention provides a rotating stage and control method for multi-station precision operation. It consists of three parts: a fixed mechanism, a moving mechanism and a carrying plane. The piezoelectric stack is used as a driver to realize steps through an inchworm-like motion principle. Progressive rotational motion. The fixed mechanism is divided into upper and lower layers, which are connected through rectangular flexible hinges. There are three sets of drive units evenly distributed on the outer diameter of the lower layer. The motion mechanism is divided into two layers, the upper and lower layers. During the assembly process, they are in clearance fit with the upper and lower layers of the fixed mechanism. Each layer of the motion mechanism is designed with a clamping unit with a bridge-type micro-displacement amplification mechanism as the main body, which is driven by a piezoelectric stack. Finally, the diameter of the moving part is increased, and the clearance fit with the fixed mechanism is converted into an interference fit to achieve clamping. In order to realize the inchworm-like motion principle, a strict timing control signal is designed, and the control signal is compensated for the nonlinearity of the drive unit. This invention has the advantages of compact structure, fast response, high positioning accuracy, and large stroke.

Description

technical field [0001] The invention relates to the field of precision machinery and precision operation, in particular to a rotary stage and a control method for multi-station precision operation. Background technique [0002] With the development of modern science and technology, the field of human research has expanded to the microscopic world. In order to improve work efficiency, multi-station precision operations have gradually become a research hotspot. The stage with precise rotation and positioning capability is the basis of multi-station precision operation, and it is increasingly demanded in the fields of microelectronics, life science, pharmaceutical chemistry, semiconductor, optics, ultra-precision machinery and its manufacturing. The traditional stage, which is driven by a motor and driven by a precision screw nut pair, a precision screw wedge, etc., has a large gap and friction, the structure is not compact enough, there are reasons such as crawling and multi-l...

AI Technical Summary

Problems solved by technology

The traditional stage, which is driven by a motor and driven by precision screw nut pairs, precision spiral wedges, etc., has a large gap and friction, the structure is not compact enough, there are reasons such as crawling, multi-link transmission, etc., which cannot meet the modern requirements. Technical Requirements for Precision Operations

Most of the rotary positioning devices designed with new driving methods can only rotate at a certain angle and cannot achieve 360° forward and reverse rotation, and some mechanisms that realize 360° forward and reverse rotation through the principle of inchworm movement also have insufficient clamping displacement to affect processing. High precision requirements, high motion friction and other defects, and its rough control strategy completely ignores the nonlinear characteristics of the piezoelectric actuator during motion. Although the motion of the stage is realized, it seriously affects the motion and positioning accuracy.

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