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Calibration method of phase-height mapping system based on piecewise polynomial fitting

A polynomial fitting and calibration method technology, applied in the field of phase measurement profilometry, can solve the problem of no related research, and achieve the effect of simplified process and high 3D reconstruction accuracy

Active Publication Date: 2021-12-14
SUZHOU RS TECH
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Problems solved by technology

The polynomial fitting calibration method has the advantages of simple calibration process, high calibration accuracy, avoiding projector calibration, etc., and has been widely studied and applied. Existing research mainly focuses on the influence of polynomial fitting order on calibration accuracy. For a certain height range There is no relevant research on the influence of the number of internal fitting data on the calibration accuracy. The number of data has an important impact on the process complexity and result accuracy of the polynomial fitting calibration method.

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  • Calibration method of phase-height mapping system based on piecewise polynomial fitting
  • Calibration method of phase-height mapping system based on piecewise polynomial fitting
  • Calibration method of phase-height mapping system based on piecewise polynomial fitting

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Embodiment Construction

[0032] The present invention will be further described in detail below in conjunction with the accompanying drawings, so that those skilled in the art can implement it with reference to the description.

[0033] It should be understood that terms such as "having", "comprising" and "including" used herein do not exclude the presence or addition of one or more other elements or combinations thereof.

[0034] The present invention is further illustrated below by specific examples. However, the specific details of the embodiments are only used to explain the present invention, and should not be construed as limiting the general technical solution of the present invention.

[0035] Step 1. In this embodiment, use an external high-precision mobile device to obtain the height values ​​of the phase difference at the corresponding position, and then obtain the polynomial fitting parameters between the phase difference and the height through the method of polynomial fitting. The formula...

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Abstract

The invention discloses a calibration method of a phase-height mapping system based on segmented polynomial fitting, that is, polynomial fitting is used to perform segmented calibration of the phase-height mapping system. According to the method proposed in this case, the measurement range Carry out interval division, and use different fitting orders in different height ranges to perform polynomial fitting calibration, so that the relative error of each position within the measurement range is minimized. In this case, the 3D reconstruction accuracy under the segmental polynomial fitting calibration Compared with the 1-6 order polynomial fitting calibration, the three-dimensional reconstruction accuracy is higher, and the process is more simplified.

Description

technical field [0001] The invention relates to phase measurement profilometry, in particular to a calibration method of a phase-height mapping system based on piecewise polynomial fitting. Background technique [0002] In phase measurement profilometry, due to the effect of the height of the object to be measured on the modulation of the sinusoidal grating, the phase change of the grating is caused, and the height information of the three-dimensional profile of the object to be measured is implied in the phase change. Therefore, to measure the height information of the object to be measured, the key is to establish the corresponding relationship between height and phase change, especially the mathematical relationship between height and phase, that is, the phase-height mapping mathematical model. The existing phase-height mapping mathematical models are mainly divided into two categories: explicit phase-height mapping models and implicit phase-height mapping models. Among ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/80G06T17/00
CPCG06T7/80G06T17/00
Inventor 吴加富缪磊万安军
Owner SUZHOU RS TECH
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