A growing device for large-aperture Cz monocrystal and a growing method thereof
A growth method and a technology of a growth device, which are applied in the field of single crystal growth devices, can solve problems such as rising costs, and achieve the effect of eliminating growth and inhibiting growth
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[0056] figure 1 1 is a schematic diagram of an embodiment of the device of the present invention, 1 is a temperature sensor, 2 is a conversion unit that converts the amount of light obtained from the temperature sensor into an electrical signal, and 4 is a control unit for crystal growth. In addition, 11 is the observation window of the crystal growth furnace, through which the aiming of the sensor 1 can obtain the boundary portion 9 where the inner surface of the quartz crucible 8 and the molten liquid 13 are inscribed, and 7 is the temperature obtained during the crystal growth period of the boundary portion 9 Changes in the temperature detection mechanism.
[0057] In addition, the light quantity acquired by the optical system sensor part of the temperature sensor 1 is guided through the optical fiber to the converter 2, and reaches the indicator through the converter 2 that converts the light quantity into an electrical signal corresponding to temperature. In addition to ...
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