Chemical vapor deposition of long carbon chain silane compounds as an airtight and waterproof method
A technology of chemical vapor deposition and long carbon chain silane, which is applied in the direction of gaseous chemical plating, metal material coating process, coating, etc., can solve problems such as air tightness detection failure, and achieve the effect of improving air tightness quality
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[0038] In order to enable those skilled in the art to understand the purpose of the present invention, preferred embodiments of the present invention are described in detail as follows.
[0039] Please refer to Figure 4 , in one embodiment, the long carbon chain silane compound is deposited on the edge of the connection between a panel 3 and a frame 4 by vacuum chemical vapor deposition. The panel is a glass panel. The panel 3 and the frame body 4 are pressed together first, and the panel 3 and the frame body 4 are bonded with glue 5 to form an assembly. Then part of the panel 3 is covered with a mask 6 to expose the surface to be deposited. Then use ozone plasma 12 to modify the surface to be deposited.
[0040] Put the assembly into a vacuum reaction chamber 11, ensure that there is no other gas in the reaction chamber to interfere with the subsequent reaction, and heat the vacuum reaction chamber to 40° C., and introduce a gas 7 containing a precursor solution of long c...
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