Manufacturing method of miniature X-ray array combined refracting lens integrated assembly

Abstract

A manufacturing method of a miniature X-ray array combined refracting lens integrated assembly comprises the following steps of (1), manufacturing an X-ray array combined refracting lens, arranging alayout structure of (M+1) combined refracting lenses so that the focuses of all (M+1) X-ray combined refracting lenses are at the same position and in an optical axis; (2), manufacturing an X-ray refracting device, wherein the X-ray refracting device and the X-ray array combined refracting lens are adjacently placed; (3), manufacturing an X-ray diaphragm, wherein the structure dimension of the X-ray diaphragm is determined according to the structure dimension of the X-ray array combined refracting lens, and realizing first-time shaping and filtering of an incident X-ray beam; and (4), adjusting the miniature X-ray array combined refracting lens integrated assembly, and placing the X-ray diaphragm, the X-ray refracting device and the X-ray array combined refracting lens on an assembly bearing platform. The manufacturing method has advantages of small dimension, simple manufacture process, high robustness, batch processing, convenient manufacturing and adjustment.

Description

technical field [0001] The invention relates to the field of X-ray detection and imaging, in particular to a manufacturing method of a novel X-ray array combined refraction lens integrated assembly used in a micro-beam X-ray fluorescence analysis system. Background technique [0002] The X-ray fluorescence (XRF, X-Ray Fluorescence) analysis system can perform simple, fast, high-resolution and non-destructive elemental quantitative measurement and analysis on samples in various forms (solid / liquid / powder, etc.) under normal pressure. The micro-beam X-ray fluorescence analysis system (micro-XRF) has attracted extensive attention because of its higher micro-resolution. [0003] Micro-beam X-ray fluorescence analysis systems (micro-XRF) usually need to be equipped with X-ray focusing devices. In the X-ray fluorescence analysis system using X-ray focusing devices, although the resolution of the micro-area is greatly improved (usually by more than one order of magnitude), the cou...

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Problems solved by technology

[0005] In order to overcome the shortcomings of the existing X-ray fluorescence spectrometer that the micro-resolution is not high enough, especially the detection sensitivity is not high enough due to the low count rate, and the structure is complex, the size is large, and the lack of portability is not enough. Invented a miniaturized X-ray fluorescence spectrometer On the basis of the ray array combined refracting lens integrated assembly, the present invention provides a manufacturing method of a miniaturized X-ray array combined refracting lens integrated assembly, laying the foundation for its application in the miniaturized micro-beam X-ray fluorescence analysis system

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